2016
DOI: 10.1016/j.matdes.2016.06.006
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Temperature-dependent stress in diamond-coated AlGaN/GaN heterostructures

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Cited by 9 publications
(1 citation statement)
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“…The stress appears in CVD process when the samples are cooled down from the deposition temperature to the room temperature. The magnitude of induced stress is affected by deposition conditions and diamond film properties (morphology, thickness) but depends mainly on the mismatch of the thermal and mechanical properties between substrate and diamond film [25,26].…”
Section: Semmentioning
confidence: 99%
“…The stress appears in CVD process when the samples are cooled down from the deposition temperature to the room temperature. The magnitude of induced stress is affected by deposition conditions and diamond film properties (morphology, thickness) but depends mainly on the mismatch of the thermal and mechanical properties between substrate and diamond film [25,26].…”
Section: Semmentioning
confidence: 99%