Temperature measurements of telecommunication lasers on a micrometre scale

Mansanares, A. M.; Fournier, Danièle; Boccara, A. C.

doi:10.1049/el:19931366

Cited by 19 publications

(14 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Previous experiments have used this technique for point measurements [2,3] and thermal mapping has been achieved by scanning a laser [4,5].…”

Section: Thermoreflectance Techniquementioning

confidence: 99%

“…In addition, radiation from large areas in the scene buries the signal from small regions on the order of a micron Many measurement techniques have been proposed [1] for high-resolution thermal imaging applications that exploit different temperature dependent properties of materials. By using the thermoreflectance [2][3][4][5][6] method, we show that real time, thermal images with sub-micron spatial resolution, and 100mK thermal resolution can be generated on active semiconductor devices. We will see how experimental results on micro-coolers, and microheaters provide design engineers with important information to optimize the device geometry.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Real Time Sub-Micron Thermal Imaging Using Thermoreflectance

Christofferson¹,

Vashaee²,

Shakouri³

et al. 2001

View full text Add to dashboard Cite

Thermal measurements on a sub-micron scale are non-trivial, but are important for the characterization of modern semiconductor and opto-electronic devices. In this paper we will discuss the application of the thermoreflectance method for real time sub-micron thermal imaging. By using light in the visible spectrum, the diffraction limit, and thus spatial resolution is improved over a traditional infrared camera based on blackbody emission. With active excitation of the sample and frequency domain filtering, thermal images with 100mK temperature resolution are obtained.Experiments performed on semiconductor micro-coolers and micro-heaters are presented.

show abstract

“…Previous experiments have used this technique for point measurements [2,3] and thermal mapping has been achieved by scanning a laser [4,5].…”

Section: Thermoreflectance Techniquementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Real Time Sub-Micron Thermal Imaging Using Thermoreflectance

Christofferson¹,

Vashaee²,

Shakouri³

et al. 2001

View full text Add to dashboard Cite

show abstract

“…For example, thermoreflectance imaging may be the only non-contact way to measure the temperature on an active semiconductor device in a cryostat. 5 who measured temperature in a semiconductor laser. Our experiments show that one can achieve both high spatial and thermal resolution, and also generate real time thermal images.…”

Section: Introductionmentioning

confidence: 99%

<title>High-resolution noncontact thermal characterization of semiconductor devices</title>

et al. 2001

View full text Add to dashboard Cite

Non-contact optical methods can be used for sub micron surface thermal characterization of active semiconductor devices. Point measurements were first made, and then real time thermal images were acquired with a specialized PINarray detector. This method of thermal imaging can have spatial resolution better than the diffraction limit of an infrared camera and can work in a wide range of ambient temperatures. The experimentally obtained thermal resolution is on the order of 50mK.

show abstract

“…[7][8][9] Typically, the thermoreflectance coefficient C th , which describes the normalized change in the reflection coefficient with temperature, for metals in the visible spectrum, is on the order of 10 −5 per degree Kelvin. Because of this small magnitude, thermoreflectance images with reasonable spatial resolution and high thermal sensitivity cannot be acquired in a typical off the shelf camera system.…”

Section: Thermoreflectance Measurementsmentioning

confidence: 99%

Thermoreflectance based thermal microscope

Christofferson¹,

Shakouri²

2005

Review of Scientific Instruments

112

View full text Add to dashboard Cite

Thermal images of active semiconductor devices are acquired and processed in real time using visible light thermoreflectance imaging with 34mK sensitivity. By using a 16×16 alternating current coupled photodiode array with synchronous frequency domain filtering a dynamic range of 123dB is achieved for 1s averaging. Thus with a stable and higher power light source, fundamentally the camera can reach 6mK sensitivity over a submicron area. The number of pixels in the image is increased to 160×160 by multiple frame image enhancement and submicron spatial resolution is achieved. The photodiode array system has a maximum 40kHz frame rate and generates a synchronous trigger for recovery of the phase signal. Amplitude and phase images of the thermoreflectance signal for 50×50 micron square active SiGe based microcoolers are presented.

show abstract

Temperature measurements of telecommunication lasers on a micrometre scale

Cited by 19 publications

References 4 publications

Real Time Sub-Micron Thermal Imaging Using Thermoreflectance

Real Time Sub-Micron Thermal Imaging Using Thermoreflectance

<title>High-resolution noncontact thermal characterization of semiconductor devices</title>

Thermoreflectance based thermal microscope

Contact Info

Product

Resources

About