attention due to its high hole mobility, [10][11][12][13] low effective mass in 2D hole gases, [14,15] good contacts with metals, [16][17][18] strong spin-orbit interactions, [19][20][21][22] capability of isotopic purification, [23] and compatibility with Si. These attractive features make Ge a promising candidate not only as a transistor channel material but also as a host for spin [6,24,25] and even topological qubits. [26,27] Excitingly, the first hole spin qubit [6] and proximity-induced superconductivity with a hard gap [28] have been realized recently in 1D Ge.Despite much progress that has been made so far, it remains a formidable challenge to have individuals as well as arrays of NWs with a high degree of addressability and scalability for the next generation of NW-based quantum devices. For example, in the field of group III-V semiconductors, precisely positioned NW networks have been achieved with predefined metal islands. [29] The out-of-plane grown NW structures, however, need to be transferred from the growth wafer to a second substrate for device fabrication, which limits their scalability. [7,29] Very recently, high-quality inplane NW networks have been successfully demonstrated with Semiconductor nanowires have been playing a crucial role in the development of nanoscale devices for the realization of spin qubits, Majorana fermions, single photon emitters, nanoprocessors, etc. The monolithic growth of site-controlled nanowires is a prerequisite toward the next generation of devices that will require addressability and scalability. Here, combining top-down nanofabrication and bottom-up self-assembly, the growth of Ge wires on prepatterned Si (001) substrates with controllable position, distance, length, and structure is reported. This is achieved by a novel growth process that uses a SiGe strain-relaxation template and can be potentially generalized to other material combinations. Transport measurements show an electrically tunable spin-orbit coupling, with a spin-orbit length similar to that of III-V materials. Also, charge sensing between quantum dots in closely spaced wires is observed, which underlines their potential for the realization of advanced quantum devices. The reported results open a path toward scalable qubit devices using nanowires on silicon.