The characterization of a magnetron-sputter-type negative-ion source

Paik, Namwoong; Kim, Steven

doi:10.1063/1.1445865

Cited by 15 publications

(3 citation statements)

References 13 publications

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“…The most common methods are the FC and the RFA. The drivers for the use and optimization of these electrostatic ion-probes are often related to applications in plasma processing like ion beam assisted deposition [125,126], plasma ion implantation [127,128] or magnetron sputtering [129][130][131], but also in space applications like ion or plasma thrusters [132][133][134]. In space plasmas, the flux of solar wind ions is measured with FCs [135].…”

Section: Diagnostics With Faraday Cups and Retarding Field Analyzersmentioning

confidence: 99%

Foundations of measurement of electrons, ions and species fluxes toward surfaces in low-temperature plasmas

Benedikt

Kersten

Piel

2021

Plasma Sources Sci. Technol.

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This foundation article discusses the diagnostics of electrons and ions in plasmas and fluxes of charged and neutral species toward plasma-facing surfaces by non-optical methods. The focus is laid on the fundamentals of the most common methods and their application to non-equilibrium low-pressure electropositive plasmas and ion beams. The key topics are Langmuir probes (LPs), Faraday cups (FCs) and energy analyzers, mass spectrometry, as well as novel calorimetric and force probes (FPs). For each method, the concepts are introduced, hints at best practice are given, and a survey of the recently published literature is included. Starting with the sheath–plasma boundary, the principles of plane and cylindrical LPs and the measurement of electron temperature and density are discussed. Beyond standard textbooks, double, triple and emissive probes are described and modulation techniques for obtaining the electron energy distribution function are presented. More technical issues related to probe compensation in radio-frequency plasmas, probe contamination, and the influence of a magnetic field are also included. The presentation is completed by modern radio-frequency techniques, such as impedance probes, multipole resonance probes, and self-excited electron resonance spectroscopy. FCs, retarding field analyzers (RFAs) as well as novel calorimetric and FPs are useful tools for the measurement of overall, not species resolved, ions and neutral species fluxes toward surfaces. RFAs provide overall ion energy distribution functions, whereas calorimetric and FPs can deliver information about fluxes of fast neutrals. The issues related to secondary electron emission, absolute signal calibration, and analysis of plasmas with complex chemistry are discussed. Mass spectrometry diagnostics is capable of mass and energy-resolved detection of ions and neutral species at the plasma-facing surfaces. Detection, identification and absolute density calibration of neutral stable and radical species are treated in detail and peculiarities of ion mass spectrometry, such as detection of negative ions, ion measurements in front of powered electrodes, or chromatic aberration and acceptance angle limitations in energy spectrum measurements are introduced.

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Section: Diagnostics With Faraday Cups and Retarding Field Analyzersmentioning

confidence: 99%

Foundations of measurement of electrons, ions and species fluxes toward surfaces in low-temperature plasmas

Benedikt

Kersten

Piel

2021

Plasma Sources Sci. Technol.

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“…However, in this investigation the target is biased positive and hence called as anode. Paik and Kim,9 Kim and Lee,10, and Oks11 had also used the planar magnetron to develop a negative ion source. They had used the magnetron in the normal mode of operation, i.e., biasing the target negative and not in reverse polarity as done in the present investigation.…”

Section: Introductionmentioning

confidence: 99%

Characterization of the Plasma Properties of a Reverse Polarity Planar Magnetron Operated as an Ion Source

Ranjan

Kalathiparambil

Vaghela

et al. 2007

Plasma Process. Polym.

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In the present study the possibility of using a planar magnetron configuration as an ion source has been studied by inverting the polarity of a DC magnetron. The characterization of the plasma properties has been performed under various operating conditions using retarding potential analyzer (RPA), Langmuir probe, and Faraday cup. The ion energy is 291 eV at 490 V anode voltage and pressure of 5 × 10−4 mbar measured using a RPA. Also the ion density is ∼1012 per cm3 as measured by Langmuir probe. Spread in energy is less (∼3 eV) at lower pressure and at higher anode voltage. This configuration behaves very well like an ion source and can be used for sputter cleaning of substrates and for ion beam‐assisted deposition applications.

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“…For many years, sputtering has been a standard thin film production technique. [1][2][3] However, due to various technological requirements, the development of novel sputtering configurations maintains a high priority. One example is the search for sputtering sources for ferromagnetic alloys/oxides in which specific difficulties occur when standard magnetron sources are used.…”

Section: Introductionmentioning

confidence: 99%

Pulsed Regime of a Hollow-Cathode Discharge Used in a Sputter Source

Apetrei¹,

Alexandroaei²,

Luca³

et al. 2006

Jpn. J. Appl. Phys.

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The pulsed operation of a cavity hollow-cathode post-discharge sputtering source was proposed to facilitate the sputtering of low-conductivity materials. Self-oscillating and externally driven pulsed regimes were investigated. The plasma density, temperature and relative density of atomic species along the discharge axis were determined by optical emission spectroscopy and Langmuir probe diagnostics. The temporal evolution of these parameters and dynamic current–voltage characteristics of the discharge were recorded in both regimes as functions of gas pressure and discharge current. The results bring more insight into the utilization of the above-mentioned device as a small sputtering source.

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The characterization of a magnetron-sputter-type negative-ion source

Cited by 15 publications

References 13 publications

Foundations of measurement of electrons, ions and species fluxes toward surfaces in low-temperature plasmas

Foundations of measurement of electrons, ions and species fluxes toward surfaces in low-temperature plasmas

Characterization of the Plasma Properties of a Reverse Polarity Planar Magnetron Operated as an Ion Source

Pulsed Regime of a Hollow-Cathode Discharge Used in a Sputter Source

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