Nuclear Instruments and Methods in Physics Research
 1981
DOI: 10.1016/0029-554x(81)90997-6
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The depth profile of high-dose low-mass ions implanted into higher mass substrate by RBS analysis

Yin She
1
,
Jingping Zhang
2
,
Qing Gu
3
et al.
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Cited by 9 publications
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Nitrogen profiling in implanted iron sample by 14N(d,α1)12C reaction

Xuanwen
1
,
Xu
2
,
Zhang
3
et al. 1989
Vacuum
1
0
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0
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Nitrogen profiling in implanted iron sample by 14N(d,α1)12C reaction

Xuanwen
1
,
Xu
2
,
Zhang
3
et al. 1989
Vacuum
1
0
0
0
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Applications of simultaneous ion backscattering and ion-induced X-ray emission

Musket1
1983
Nuclear Instruments and Methods in Physics Research
16
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1
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Iterative subtraction of backscattering spectra in determining the depth profile of arsenic implanted in niobium films

Wang
1
,
Xianren
2
1986
Nuclear Instruments and Methods in Physics Research Section B:
2
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1
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