2016
DOI: 10.1149/2.0901606jes
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The Development of Cu Filling and Reliability Performance with Ru-Ta Alloy Barrier for Cu Interconnects

Abstract: Ru-Ta alloy was investigated as the diffusion barrier layer in Cu dual damascene interconnects, and Cu filling property and reliability performances with RuTa/RuTa(N) stacked barrier structure were mainly evaluated. RuTa strongly orientated to Ru(002) and the lattice misfit between Ru(002) and Cu(111) was lower than that between Ta(110) and Cu(111). The wettability of Cu seed on RuTa was much better than that on Ta. The barrier property against Cu diffusion of RuTa/RuTa(N) stacked barrier structure kept the e… Show more

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Cited by 17 publications
(19 citation statements)
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“…This rollover effect, with S-shaped J-V curves, has been reported previously for non-optimal tandem cells, associated with the reverse breakdown voltage regime of the top cell when the tandem is current-mismatched [70]. While this explanation is certainly plausible here, we note that other effects may cause a rollover effect in single-junction solar cells, as was reviewed recently in [71].…”
Section: Fabrication Of a Monolithic Czts/si Solar Cellsupporting
confidence: 83%
“…This rollover effect, with S-shaped J-V curves, has been reported previously for non-optimal tandem cells, associated with the reverse breakdown voltage regime of the top cell when the tandem is current-mismatched [70]. While this explanation is certainly plausible here, we note that other effects may cause a rollover effect in single-junction solar cells, as was reviewed recently in [71].…”
Section: Fabrication Of a Monolithic Czts/si Solar Cellsupporting
confidence: 83%
“…[12][13][14][15][16][17] Most of these materials are binary or ternary materials involving refractory metals, such as Ta, Mo and Os. [18][19][20][21][22][23] Less work has been undertaken to find good liner materials. Most of the experimental work focuses on studying a liner material in combination with a particular diffusion barrier.…”
Section: Introductionmentioning
confidence: 99%
“…[12][13][14][15][16][17] Most of these materials are binary or ternary materials involving refractory metals, such as Ta, Mo and Os. [18][19][20][21][22][23] Less work has been undertaken to find good liner materials. Most of the experimental work focuses on studying a liner material in combination with a particular diffusion barrier.…”
Section: Introductionmentioning
confidence: 99%