The effects of residual gases on optical constants of Al films

An attenuated total reflection (ATR) instrument for the observation of angle- and frequency-scanned ATR spectra has been constructed. Light characterized by various wave vectors and dispersed into a spectrum has been detected by a charge coupled device camera after reflection from a rotating mirror and a diffraction grating. Two elliptic mirrors and a prism-sample unit have been set between the rotating mirror and the diffraction grating for the purpose of controlling the light path. The images obtained have been analyzed by a digital image processing system so that angle-scanned ATR signals are obtained for various wavelengths (500–800 nm). The time required to acquire one image has been 0.7 s in the present system. The dependence of the dielectric constant of a Ag film on wavelength is given here as an example measured by our system.

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The effects of residual gases on optical constants of Al films

Cited by 4 publications

References 24 publications

Studies on optical constants of metal films evaporated at low temperatures

Studies on optical constants of metal films evaporated at low temperatures

Optical constants and growth mode of Ni films deposited on evaporated Al, Ag and Cu films

Experimental instrument for observing angle- and frequency-scanned attenuated total reflection spectra

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