Articles you may be interested inEffect of thermal annealing on optical emission properties of lowtemperature grown AlGaAs/GaAs multiple quantum wells Annihilation of monolayer holes on molecular beam epitaxy grown GaAs surface during annealing as shown by in situ scanning electron microscopyThe effects of growth temperature and subsequent annealing temperatures on the electrical properties of the low temperature ͑LT͒ grown GaAs have been investigated. It was found that the resistivity of the as-grown LT-GaAs layer increased with increasing growth temperature, but was accompanied by a reduction of breakdown voltage over the same temperature range. Thermal annealing of the samples caused the resistivity to rise exponentially with increasing annealing temperature T A , giving an activation energy of E A ϭ2.1 eV. The transport of the LT-GaAs layers grown at T g р250°C was found to be dominated by hopping conduction in the entire measurement temperature range ͑100-300 K͒, but following annealing at T A Ͼ500°C, the resistivity-temperature dependence gave an activation energy of ϳ0.7 eV. The breakdown voltage V BD , for as-grown LT-GaAs was enhanced on lowering the measurement temperature, but conversely, decreased over the same temperature range following annealing at T A Ͼ500°C. The hopping conduction between arsenic defects, or arsenic clusters in annealed samples, is believed to be responsible for the observed electrical breakdown properties. Since the resistivities of the as-grown LT-GaAs layers are dependent, solely, on the excess arsenic, which in turn depends on the growth temperature, then the resistivities obtained can be used as a measure of the growth temperature.