The Fabrication of Trans-Scale Micro-Fuze Safety Device

Du, Li; Wang, Ao An; Zhao, Ming; Song, Man Cang

doi:10.4028/www.scientific.net/kem.609-610.796

Cited by 5 publications

(4 citation statements)

References 6 publications

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“…For the fabrication of MEMS setback arming devices, nonsilicon-based micromachining technology (generally a lithography electroforming micro molding (LIGA) process or an ultraviolet-LIGA (UV-LIGA) process) and silicon-based micromachining technology (generally a deep reactive-ion etching (DRIE) process or a silicon-on-insulator (SOI) process) are commonly used. The cost of these processes is high, and no cheap mass production method has been found [24,25]. To solve the above problems, a vertical-frame-based setback arming device that also uses environmental force to release the safety is proposed in this paper, and low-speed wire electrical discharge machining (EDM) is successfully applied to the fabrication of the device.…”

Section: Introductionmentioning

confidence: 99%

Test and Improvement of a Fuze MEMS Setback Arming Device Based on the EDM Process

et al. 2022

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This paper introduces the working principle of a MEMS safety and arming (S&A) device for a fuze that is installed perpendicular to the axis of the projectile. Additionally, the application of low-speed wire electrical discharge machining (EDM) in the fabrication of the device is proposed. Microsprings are susceptible to flexural deformation and secondary deformation in the EDM process, a problem that is solved by designing the auxiliary support beam, using multiple cuts, destress annealing and optimizing the processing parameters. The difficult problem of setback slider deformation in the principle prototype test is properly solved by establishing V-shaped grooves at both ends of the setback slider. The connection mode between the microspring and the frame is changed to a clearance fit connection. The improved setback arming device can guarantee service process safety and launch reliability. The maximum overload that can be withstood in service processing is 20,000 g, and the minimum overload for safety release during launch is 12,000 g. The results show that the EDM process can greatly reduce the machining cost while improving the machining precision and machining speed, which can compensate for the defects of the current manufacturing technology.

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Section: Introductionmentioning

confidence: 99%

Test and Improvement of a Fuze MEMS Setback Arming Device Based on the EDM Process

et al. 2022

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“…Three main methods are used to fabricate MEMS Safety and Arming devices. The first way is the ‘lithographie, galvanoformung, abformung’ (LIGA) method, which is based on metal substrates [ 12 , 13 , 14 , 15 ]. In this method, a MEMS metal spring and slide are needed, and the structures are set perpendicular to each other to form an interlocking mechanism.…”

Section: Introductionmentioning

confidence: 99%

Study on Characteristics of Electromagnetic Coil Used in MEMS Safety and Arming Device

et al. 2020

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Traditional silicon-based micro-electro-mechanical system (MEMS) safety and arming devices, such as electro-thermal and electrostatically driven MEMS safety and arming devices, experience problems of high insecurity and require high voltage drive. For the current electromagnetic drive mode, the electromagnetic drive device is too large to be integrated. In order to address this problem, we present a new micro electromagnetically driven MEMS safety and arming device, in which the electromagnetic coil is small in size, with a large electromagnetic force. We firstly designed and calculated the geometric structure of the electromagnetic coil, and analyzed the model using COMSOL multiphysics field simulation software. The resulting error between the theoretical calculation and the simulation of the mechanical and electrical properties of the electromagnetic coil was less than 2% under the same size. We then carried out a parametric simulation of the electromagnetic coil, and combined it with the actual processing capacity to obtain the optimized structure of the electromagnetic coil. Finally, the electromagnetic coil was processed by deep silicon etching and the MEMS casting process. The actual electromagnetic force of the electromagnetic coil was measured on a micro-mechanical test system, compared with the simulation, and the comparison results were analyzed.

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“…The results showed that the ball-driven MEMS setback arming device had appropriate safety and arming performance. There has been little research on the fabrication process of MEMS S&A devices; most researchers use the DRIE (deep reactive ion etching) process, LIGA process or UV-LIGA process to fabricate these devices [19]- [22]. These methods have many limitation, such as process complexity, high processing costs, large fabrication errors and long processing times [23]- [28].…”

Section: Introductionmentioning

confidence: 99%

Optimization of a Fuze MEMS Setback Arming Device Based on the EDM Process

2020

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This paper introduces the working principle of a MEMS safety and arming (S&A) device and measures and tests a setback arming device. To solve the problem of large fabrication errors in the UV-LIGA process, a MEMS S&A fuze device fabricated by low-speed wire electrical discharge machining (EDM) is proposed. Microsprings are susceptible to flexural deformation and secondary deformation in the EDM process, which is solved by setting the auxiliary support beam, using multiple cuts and destress annealing. The linewidth, thickness and elastic coefficient of the microspring fabricated using the EDM process are closer to the designed values than those fabricated using the UV-LIGA process under the same conditions. When comparing the MEMS S&A devices fabricated by the two processes, it is found that the EDM process has a the higher machining accuracy. In view of the plastic deformation of the upper end of the microspring, the structure of the microspring is optimized to incorporate a gradient linewidth, and the optimized setback arming device is tested. The results show that the device can ensure service process safety and launch reliability. The maximum overload that can be withstood in service processing is 17000 g, and the minimum overload for insurance release during launch is 1500 g. INDEX TERMSFuze, MEMS safety and arming device, UV-LIGA process, EDM process, microspring.

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The Fabrication of Trans-Scale Micro-Fuze Safety Device

Cited by 5 publications

References 6 publications

Test and Improvement of a Fuze MEMS Setback Arming Device Based on the EDM Process

Test and Improvement of a Fuze MEMS Setback Arming Device Based on the EDM Process

Study on Characteristics of Electromagnetic Coil Used in MEMS Safety and Arming Device

Optimization of a Fuze MEMS Setback Arming Device Based on the EDM Process

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