“…Several attempts have been made to further improve the properties of DLC. The amorphous nature of DLC allows for incorporation of a third element, such as Si (Jones et al, 2010;Lee et al, 1997Lee et al, , 2002Maguire et al, 2005;Ogwu et al, 2008;Okpalugo et al, 2004;Papakonstantinou et al, 2002), F (Hasebe et al, 2006(Hasebe et al, , 2007Saito et al, 2005), P (Kwok et al, 2005), Ag (Ahmed et al, 2009;Choi et al, 2007Choi et al, , 2008Kwok et al, 2007), N (Okpalugo et al, 2008;Yokota et al, 2007), or Ti (Bui et al, 2008;Gilmore and Hauert, 2001;Ouyang and Sasaki, 2005;Pandiyaraj et al, 2012), the concentration of which significantly affects the resulting DLC properties. For example , Choi et al (2007) prepared Ag-incorporated DLC films using ion beam…”