The multipole resonance probe: characterization of a prototype

Abstract

The multipole resonance probe (MRP) was recently proposed as an economical and industry compatible plasma diagnostic device (Lapke et al 2008 Appl. Phys. Lett. 93 051502). This communication reports the experimental characterization of a first MRP prototype in an inductively coupled argon/nitrogen plasma at 10 Pa. The behavior of the device follows the predictions of both an analytical model and a numerical simulation. The obtained electron densities are in excellent agreement with the results of Langmuir probe measurements.

The Planar Multipole Resonance Probe: Challenges and Prospects of a Planar Plasma Sensor

“…While passive plasma resonance spectroscopy (PPRS) observes existing excitations of the plasma, e.g., the RF power, active plasma resonance spectroscopy (APRS) couples a suitable RF signal into the plasma and evaluates the corresponding frequency response [11], [12]. One representative of the PPRS is the so-called self-excited electron resonance spectroscopy (SEERS) method, with possible applications limited to capacitive coupled plasmas (CCPs) as shown in [13].…”

Investigation of interactions between plasmas and RF-diagnostics: Challenges of complex 3D-electromagnetic field simulations

“…Comparing the simulation (solid line) to a correlating measurement (dashed line) in an argon plasma inside a double inductive coupled plasma (DICP) described in [2], a very good agreement between simulation and measurement can be seen. An electrical field monitor at the resonance frequency and one at an arbitrary frequency depict a spatially resolved energy coupling and no coupling into the plasma, respectively.…”

“…Based on the so-called multipole resonance probe (MRP), presented in [2] and [3], the interaction processes and the challenges of the used simulation tool are depicted.…”

A new approach on advanced compact plasma sensors for industrial plasma applications

“…Here, mainly indirect information is used for the calculation of the plasma parameters, necessary to control the process. While passive plasma resonance spectroscopy observes existing excitations of the plasma, like the RF power for example, active plasma resonance spectroscopy (APRS) couples a suitable RF signal into the plasma and evaluates the corresponding frequency response [5], [6]. Here, the hairpin probe or the plasma absorption probe can be named [7], [8], which both have a complex resonance behaviour.…”