The properties of BCN films formed by ion beam assisted deposition

Synthesis and characterization of boron incorporated diamond-like carbon thin films

“…B and N co-incorporated DLC thin films have been fabricated by various deposition techniques, including radio frequency magnetron sputtering (Nakazawa et al, 2010), microwave plasma enhanced CVD (Wu et al, 2002), ion beam assisted deposition (Yasui et al, 2000), and dual cesium ion beam sputtering (Byon et al, 2003). The compounds of boron nitride, CN x and boron carbon nitride can be formed in B and N co-incorporated DLC films (Ulrich et al, 2009) and the films can exhibit prominent characteristics such as improved tribological properties and toughness (Robertson, 2002), enhanced thermal and chemical stability (Maitz et al, 2006), good thermal conductivity and oxidation resistance (Ulrich et al, 2009).…”

Influence of deposition parameters on surface roughness and mechanical properties of boron carbon nitride coatings synthesized by ion beam assisted deposition

“…For the BCN coatings deposited by IBAD, Yasui et al [30] have already indicated that the BCN coatings made from B 4 C target exhibited higher hardness and lower friction coefficients as sliding against steel ball in air. Prof. Albella's group [36] also reported that the c-BCN coatings had been synthesized successfully through evaporating B 4 C target and the simultaneous bombardment of the ions from mixture of Ar + N 2 + CH 4 gas.…”

Synthesis and characterization of cubic BC2N grown by reactive laser ablation

“…In previous papers, the excellent mechanical properties of new layered compounds boron-carbon-nitrogen (BC 2 N) are investigated and predicted based on a generalized valence-force field model which force constants have been determined from ab-initio total energy calculation [1][2][3], for such reason the production and the characterization of the BC x N y thin films have been chosen for many experimental works. For instance, hexagonal BCN coatings with low hardness have been deposited by chemical vapor deposition (CVD) or plasma assisted chemical vapor deposition (PACVD) techniques with different organic precursors [4,5], whereas c-BCN films with higher hardness than the former have been synthesized by physical vapor deposition (PVD) processes by using ion bombardment assistance during deposition, such as sputtering [6][7][8], ion beam assisted deposition (IBAD) [9,10], and pulsed laser ablation [11,12]. According to Yasui et al [9], BCN coatings deposited by IBAD employing a B 4 C target exhibited high hardness and low friction coefficients as sliding against steel ball in air.…”

“…For instance, hexagonal BCN coatings with low hardness have been deposited by chemical vapor deposition (CVD) or plasma assisted chemical vapor deposition (PACVD) techniques with different organic precursors [4,5], whereas c-BCN films with higher hardness than the former have been synthesized by physical vapor deposition (PVD) processes by using ion bombardment assistance during deposition, such as sputtering [6][7][8], ion beam assisted deposition (IBAD) [9,10], and pulsed laser ablation [11,12]. According to Yasui et al [9], BCN coatings deposited by IBAD employing a B 4 C target exhibited high hardness and low friction coefficients as sliding against steel ball in air. Albella et al [13] also reported that the c-BCN coatings were synthesized successfully through evaporating B 4 C target and the simultaneous bombardment of the ions from mixture of (Ar + N 2 + CH 4 ) gas.…”