2013
DOI: 10.4028/www.scientific.net/kem.562-565.1242
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The Reliability of Micro-Spring under Dynamic Circumstances

Abstract: This article mainly focuses on the reliability of micro-spring, which as a typical component of MEMS device, applies electrodeposited nickel material and is fabricated by LIGA process, being used under the circumstances like transporting and restoring which may induce shock and crash. Griffith theory of brittle fracture and Abaqus FEA simulation software are applied for analyzing the probable failure modes of the micro-spring as overloaded. And the principle of elastic deformation, energy-time and displacement… Show more

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“…The fracture of the movable part can cause the malfunction of MEMS device. Fracture failure of MEMS devices is an important factor that affects the reliability of the study [9][10][11][12][13][14]. The phenomenon of movable part fracture has been the focus of attention.…”
mentioning
confidence: 99%
“…The fracture of the movable part can cause the malfunction of MEMS device. Fracture failure of MEMS devices is an important factor that affects the reliability of the study [9][10][11][12][13][14]. The phenomenon of movable part fracture has been the focus of attention.…”
mentioning
confidence: 99%