Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)
DOI: 10.1109/issm.2000.993663
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The role of test structures for yield enhancement and yield ramp-up: an example of adoptive yield enhancement (AYE): n/sup +//p-well junction leakage enhanced the abnormal leakage current of NMOS's parasitic NPN-BJT

K.Y.-Y. Doong1,
Binson Shen2,
Sunnys Hsieh3
et al.

Abstract: The yield loss of 0.25 um SRAM causing by the

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