The simulation, fabrication technology and characteristic research of micro-pressure sensor with isosceles trapezoidal beam-membrane

Wu, Jing; Zhao, Xiaofeng; Liu, Yibo

doi:10.1142/s0217984920503285

Cited by 3 publications

(2 citation statements)

References 20 publications

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“…Compared with the CBM structure, the new configuration increases the maximum value of the difference in transverse and longitudinal stresses of 43.2%, and their nonlinearity error is very close. Further, Wu et al presented an isosceles trapezoidal beam–membrane (ITBM) configuration on a square diaphragm [ 30 ]. Four isosceles trapezoidal beams (ITBs) were symmetrically settled on the edges of a square diaphragm, and the length of ITBs was 14.5% (580 μm/4000 μm) of the diaphragm.…”

Section: Structural Engineering In Diaphragmsmentioning

confidence: 99%

Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review

Liu¹,

Jiang

Yang³

et al. 2023

Micromachines

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The longstanding demands for micropressure detection in commercial and industrial applications have led to the rapid development of relevant sensors. As a type of long-term favored device based on microelectromechanical system technology, the piezoresistive micropressure sensor has become a powerful measuring platform owing to its simple operational principle, favorable sensitivity and accuracy, mature fabrication, and low cost. Structural engineering in the sensing diaphragm and piezoresistor serves as a core issue in the construction of the micropressure sensor and undertakes the task of promoting the overall performance for the device. This paper focuses on the representative structural engineering in the development of the piezoresistive micropressure sensor, largely concerning the trade-off between measurement sensitivity and nonlinearity. Functional elements on the top and bottom layers of the diaphragm are summarized, and the influences of the shapes and arrangements of the piezoresistors are also discussed. The addition of new materials endows the research with possible solutions for applications in harsh environments. A prediction for future tends is presented, including emerging advances in materials science and micromachining techniques that will help the sensor become a stronger participant for the upcoming sensor epoch.

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Section: Structural Engineering In Diaphragmsmentioning

confidence: 99%

Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review

Liu¹,

Jiang

Yang³

et al. 2023

Micromachines

View full text Add to dashboard Cite

show abstract

“…On the whole, compared with flat and composite structural membranes, the beam membrane is easier to fabricate, has a higher characteristic frequency and has a better stress concentration effect. Therefore, the crossbeam structure with widened roots was designed by optimizing on the basis of previous studies [ 23 , 24 ]. The crossbeam is located on the front side of the pressure sensitive membrane, and the symmetry axis of the crossbeam is consistent with that of the sensor chip.…”

Section: Structure Design and Optimizationmentioning

confidence: 99%

Design and Fabrication of a High-Temperature SOI Pressure Sensor with Optimized Crossbeam Membrane

Hao

Wang

et al. 2023

Micromachines

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This paper presents a SOI piezoresistive pressure sensor with the crossbeam membrane. The roots of the crossbeam were widened, which solved the problem of the poor dynamic performance of small-range pressure sensors working at a high temperature of 200 °C. A theoretical model was established to optimize the proposed structure, which combined the finite element and the curve fitting. Using the theoretical model, the structural dimensions were optimized to obtain the optimal sensitivity. During optimization, the sensor nonlinearity was also taken into consideration. The sensor chip was fabricated by MEMS bulk-micromachining technology, and Ti/Pt/Au metal leads were prepared to improve the sensor ability of high-temperature resistance over a long time. The sensor chip was packaged and tested, and the experimental results show the sensor achieved an accuracy of 0.241% FS, nonlinearity of 0.180% FS, hysteresis of 0.086% FS and repeatability of 0.137% FS at the high temperature. Given the good reliability and performance at the high temperature, the proposed sensor provides a suitable alternative for the measurement of pressure at high temperatures.

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Advancing healthcare through piezoresistive pressure sensors: a comprehensive review of biomedical applications and performance metrics

Alghrairi,

Farhan,

Ridha

et al. 2024

J. Phys. Commun.

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Piezoresistive pressure sensors have transformed biomedical applications, enabling precise diagnostics and monitoring. This concise review explores the fundamental principles, key components, and fabrication techniques of piezoresistive pressure sensors, focusing on critical performance metrics such as sensitivity, accuracy, and response time. Biomedical design challenges, including biocompatibility and long-term stability, are examined, offering insights into solutions for optimal sensor integration. In diverse biomedical applications, piezoresistive pressure sensors play pivotal roles, from blood pressure monitoring to implantable medical devices. The paper emphasizes their versatility in enhancing patient care through continuous and accurate monitoring. Looking forward, the review discusses emerging trends and potential research directions, positioning piezoresistive pressure sensors as central contributors to the future of biomedical technology, promising improved patient outcomes and advanced healthcare delivery through precise and continuous monitoring.

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The simulation, fabrication technology and characteristic research of micro-pressure sensor with isosceles trapezoidal beam-membrane

Cited by 3 publications

References 20 publications

Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review

Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review

Design and Fabrication of a High-Temperature SOI Pressure Sensor with Optimized Crossbeam Membrane

Advancing healthcare through piezoresistive pressure sensors: a comprehensive review of biomedical applications and performance metrics

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