“…[1][2][3][4] Besides the most widely investigated III-V DMSs, 5,6 IV DMSs have attracted particular attention owing to their compatibility with the current mature Si integration technology. [7][8][9][10][11][12] However, most studies have mainly focused on Mn-doped IV semiconductors, [8][9][10][13][14][15][16][17][18][19][20] which often suffer from Mn-related clusters or second-phase precipitates, such as Ge 3 Mn 5 , 17,20 Ge 8 Mn 11 , 13 GeMn 3.4 , 19 and Si 1.7 Mn, 16 being easily formed during their growth. On the other hand, Fe-related clusters or precipitates are rarely observed in Fe-doped IV DMSs 11,12,[21][22][23][24][25] since Fe has a lesser tendency to form clusters than Mn in semiconductors.…”