Theoretical and experimental analysis of high Q SAW resonator transient response in a wireless sensor interrogation application

Varshney, Pratyush; Panwar, B.S.; Rathore, Pradeep; Ballandras, S.; Bart, François; Martin, Gilles; Friedt, J.M.; Retornaz, T.

doi:10.1109/fcs.2012.6243714

Cited by 18 publications

(10 citation statements)

References 20 publications

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“…The shift in the resonance frequency of the resonator generated with the varying piezoelectric plate physical characters, caused by external factors, such as the temperature, strain, and torque. 19 The required parameters can be obtained by measuring the shift of the center frequency. (Figure 1(c)) originally, including the number of interrogator antennas and SAW sensors, the sampling intervals, and RF signal frequencies, and then the interrogator unit sends out RF signal (electromagnetic wave) at a specific frequency and over a given time period toward the SAW sensor.…”

Section: Theory and Principle Of Saw Sensorsmentioning

confidence: 99%

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Transmission and measurement characteristics evaluation of surface acoustic wave sensor on rotating spindle in machine tools

Yao

Luan

2016

Advances in Mechanical Engineering

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Surface acoustic wave sensors offer overwhelming advantages over other potentially competitive sensing technologies in rotating mechanical structures for their wireless and passive capability. Nevertheless, the challenges of using these sensors have not been adequately addressed. Radio frequency signal of surface acoustic wave sensors acts as not only the role of data transmission but also the role of energy supply during the sensing system working process. Thus, the performance of surface acoustic wave sensors when they are used to monitor rotating spindles should be investigated due to the harsh metallic environments for radio propagation in machine tool. This article aims to experimentally study the performance of surface acoustic wave sensors on both rotating spindle with Computer Numerical Control machine tool and self-developed spindle apparatus. The measurement study is performed using a temperature surface acoustic wave sensor working in the Industrial Scientific and Medical (ISM) band (433.05-434.79 MHz). Experimental results have shown that transmission and measurement characteristics were closely depended on the surface acoustic wave sensor installation location and rotation speeds. The conclusions will directly guide the sensor location optimization, power setting, errors avoidance, or correction in the future work.

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Section: Theory and Principle Of Saw Sensorsmentioning

confidence: 99%

Section: Theory and Principle Of Saw Sensorsmentioning

confidence: 99%

Transmission and measurement characteristics evaluation of surface acoustic wave sensor on rotating spindle in machine tools

Yao

Luan

2016

Advances in Mechanical Engineering

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“…The capability of producing single SAW resonators with resonant frequency inside the 433.92 MHz ISM band has been proven in many studies and for different purposes. Varshney et al [17] investigated the transient response of a commercially available resonator. Forsen et al [18] used nano-imprint lithography (NIL) to fabricate resonators in a wide range of frequencies, with performance and yield comparable to industrial processes.…”

Section: Introductionmentioning

confidence: 99%

Surface Acoustic Wave Resonators for Wireless Sensor Network Applications in the 433.92 MHz ISM Band

Moutoulas

Hamidullah

Prodromakis

2020

Sensors

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Surface acoustic wave (SAW) resonators are low cost devices that can operate wirelessly on a received radio frequency (RF) signal with no requirement for an additional power source. Multiple SAW resonators operating as transponders that form a wireless sensor network (WSN), often need to operate at tightly spaced, different frequencies inside the industrial, scientific and medical (ISM) bands. This requires nanometer precision in the design and fabrication processes. Here, we present results demonstrating a reliable and repeatable fabrication process that yields at least four arrays on a single 4-inch wafer. Each array consists of four single-port resonators with center frequencies allocated inside four different sub-bands that have less than 50 kHz bandwidth and quality factors exceeding 8000. We see promise of standard, low-cost photolithography techniques being used to fabricate multiple SAW resonators with different center resonances all inside the 433.05 MHz–434.79 MHz ISM band and a mere 100 kHz spacing. We achieved that by leveraging the intrinsic process variation of photolithography and the impact of the metallization ratio and metal thickness in rendering distinct resonant frequencies.

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“…Many laboratories develop currently resonators dedicated to time bases by means of collective process and using microtechnologies [1][2][3][4][5][6]. Some of the oscillators produced by these MEMS technologies could be perturbed by the inherent noise of the resonator which limits performances.…”

Section: Introductionmentioning

confidence: 99%

Phase noise measurements of AlN contour-mode resonators

Vaillant

Sthal

Imbaud

et al. 2016

2016 IEEE International Frequency Control Symposium (IFCS)

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Theoretical and experimental analysis of high Q SAW resonator transient response in a wireless sensor interrogation application

Cited by 18 publications

References 20 publications

Transmission and measurement characteristics evaluation of surface acoustic wave sensor on rotating spindle in machine tools

Transmission and measurement characteristics evaluation of surface acoustic wave sensor on rotating spindle in machine tools

Surface Acoustic Wave Resonators for Wireless Sensor Network Applications in the 433.92 MHz ISM Band

Phase noise measurements of AlN contour-mode resonators

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