1995
DOI: 10.1016/0168-583x(95)00186-7
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Theoretical approximations for depth resolution calculations in IBA methods

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Cited by 175 publications
(79 citation statements)
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“…In general, the spectra for nanoparticles have larger energy-loss variations in comparison to uniform films. These effects, also called structured-induced energy spread, 30 lead to an energy spectrum with a rounded maximum ͑no plateau is observed͒. Of course, these differences can be observed as long as the electronic energy-loss straggling is not too large.…”
Section: Resultsmentioning
confidence: 99%
“…In general, the spectra for nanoparticles have larger energy-loss variations in comparison to uniform films. These effects, also called structured-induced energy spread, 30 lead to an energy spectrum with a rounded maximum ͑no plateau is observed͒. Of course, these differences can be observed as long as the electronic energy-loss straggling is not too large.…”
Section: Resultsmentioning
confidence: 99%
“…Geometrical spread is caused by the nite sizes of detector aperture and beam spot and results in a spread of exit and reaction angles [18,Section 4.2]. The spread of exit angles causes path length di erences for emerging particles, thus resulting in energy spread, while the spread of reaction angles results in kinematic energy spread.…”
Section: Deuterium In Carbonmentioning
confidence: 99%
“…Energy-loss straggling in the target and stopper foils, energy spread due to multiple scattering in target and foil, geometrical spread due to nite beam size and detector aperture, and detector resolution were taken into account [21,18]. SRIM-2003 stopping powers [22] and crosssection data from [15] were used.…”
Section: Depth Resolution Calculation and Computer Simulationmentioning
confidence: 99%
“…7a for instance, how much of the tailing of the oxygen profile for example, is due to energy spread effects and how much is due to native oxygen impurity in the Ti target source. Given a surface depth resolution of 64 Â 10 15 at.cm À2 for oxygen atoms, an edge width of about 100 Â 10 15 at.cm À2 at the first (topmost) interface seems to sug-gest considerable energy spread effects, notably multiple scatter-ing [30]. Unfortunately with the given limitation in the energy resolution of the detector system, and the fact that other energy spread effects are not taken into account in the calculation, no concrete elucidation of the interfacial structure can be reliably obtained from the depth profiles as they are.…”
Section: Konzerd Calculation Of Depth Profilesmentioning
confidence: 99%