a b s t r a c tZnSnP 2 is a promising candidate as a solar absorbing material consisting of earth-abundant and low-toxic elements. In this study, the phosphidation method, where co-sputtered Zn-Sn thin films react with phosphorus gas, was adopted for fabricating ZnSnP 2 thin films. To establish the conditions for producing ZnSnP 2 thin films, we investigated the influence of phosphidation temperature on the product phases, and interpreted the experimental results using chemical potential diagrams of the Zn-Sn-P system. ZnSnP 2 thin films with a single phase were obtained by phosphidation at 500°C under a phosphorus vapor pressure of 10 −2 atm. However, formation of ZnSnP 2 protrusions was observed on the surface of the thin films. Based on the experimental results and the chemical potential diagrams, it is indicated that un-reacted liquid Sn particles reacted with Zn and phosphorus gas to form ZnSnP 2 protrusions in a manner similar to the vapor-Liquid-Solid growth mode.