Theoretical study on SAW characteristics of layered structures including a diamond layer

Nakahata, H.; Hachigo, A.; Higaki, K.; Fujii, Satoshi; Shikata, Shinichi; Fujimori, Naoji

doi:10.1109/58.384444

Cited by 203 publications

(76 citation statements)

References 14 publications

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“…where eff is the coefficient of effective viscosity, eff = /(1 + ( )), and and are the coefficients of viscosity and Knudsen number, respectively [15].…”

Section: Basic Theorymentioning

confidence: 99%

Air Damping Analysis in Comb Microaccelerometer

Zhou

Chen

Peng

et al. 2014

Advances in Mechanical Engineering

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Air damping significantly influences the dynamical characteristics of MEMS accelerometers. Its effects at micro-scale level sharply depend on the structure layouts and size of MEMS devices. The damping phenomenon of comb microaccelerometers is investigated. The air between fixed plate electrodes and movable plate electrodes cannot flow freely and is compressed. The air damping, therefore, exhibits both viscous effects and stiffness effects. The former generates a drag force like that in macromechanical systems, and the damping force is proportional to the velocity of movable electrodes. The latter stiffens the rigidity of structure, and the stiffening level is related to the gap value of capacitors, internal pressure, and temperature. This paper focuses on the dependence of the squeeze film air damping on capacitor gaps. The simulation and experiments indicate that the squeeze film effect is sharply affected by the gap value when the structural dimensions decrease. And the influence of fabrication errors is considered in damping design in comb microaccelerometers.

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“…where eff is the coefficient of effective viscosity, eff = /(1 + ( )), and and are the coefficients of viscosity and Knudsen number, respectively [15].…”

Section: Basic Theorymentioning

confidence: 99%

Air Damping Analysis in Comb Microaccelerometer

Zhou

Chen

Peng

et al. 2014

Advances in Mechanical Engineering

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“…Theoretical study of SAW characteristics with multilayered structure can be performed by the conventional approach using Campbell's method or the transfer matrix approach. 12,13 However, these methods are only applicable to insulating layers. Previously, Reinhardt and his coauthors extended the scattering matrix method to metals, 18 so the conductive Metglas layer in our case can be taken into account.…”

Section: Theoretical Modelmentioning

confidence: 99%

“…Previously, it has been demonstrated that the SAW velocity can be dramatically increased from 2600 m/s up to 10,000 m/s by insertion of a diamond layer with much higher Young's modulus between the piezoelectric layer and the silicon substrate. 12,13 In current MESAW, it is our interest to study how the applied magnetic field alter the center frequency of SAW by dynamically varying the Young's modulus (E) of the neighboring Metglas substrate.…”

Section: Introductionmentioning

confidence: 99%

Theoretical investigation of magnetoelectric surface acoustic wave characteristics of ZnO/Metglas layered composite

Huang¹,

Lyu²,

Wen³

et al. 2016

AIP Advances

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The surface acoustic wave properties of piezoelectric/magnetostrictive layered structures consisting of insulating ZnO and metallic Metglas with giant Δ E effect were studied based on a stable scattering matrix method. Only the first Rayleigh mode was found with phase velocity between 2200 m/s and 2650 m/s, and the maximum electro-mechanical coupling coefficient about 1%. It was found that the center frequency of ZnO/Metglas is highly sensitive on the change of magnetic field, up to 440 MHz/Oe. However, there is a cutoff Young’s modulus of Metglas for different designs of SAW, below which the Rayleigh mode will disappear. For a magnetoelectric SAW design with the center frequency of 335 MHz and covering a full magnetic field range from -1.4 to +1.4 Oe, the frequency sensitivity is 212 MHz/Oe, equivalent to a magnetic field sensitivity of 5 × 10−12 Tesla. Unlike conventional magnetoelectric bulk laminates or film stacks, the detection of frequency shift instead of electrical charge allows not only shrinkage of device volume but also a broad frequency band detection of weak magnetic field.

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“…Highly c-axis-oriented AlN films were achieved on the substrate by rf magnetron sputtering, and are assumed to be independent of the substrate polarity [7]. Following the similar approach as developed by Campbell and Jones [10][11][12], a matrix method is employed here to calculate the SAW velocity in a layered piezoelectric structure. The acoustic and electric fields in media 1 and 2 can be expressed as…”

Section: Methods Of Analysismentioning

confidence: 99%

“…Following the approach proposed by Campbell and Jones [10,11], a matrix method is presented to determine SAW characteristics of layered piezoelectric structures with IDTs and/or metal thin films deposited at different interfaces. Detailed derivations are discussed in Section II.…”

Section: Introductionmentioning

confidence: 99%

Propagation Characteristics of Surface Acoustic Waves in AlN/128° Y–X LiNbO₃ Structures

Lee

et al. 2009

jjap

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In this study, propagation characteristics of surface acoustic waves (SAWs) in a layered piezoelectric structure consisting of an AlN thin film sputtered on 128°Y-X LiNbO 3 are investigated. The phase velocity and coupling coefficient of the layered structure with interdigital transducers (IDTs) and/or metal thin films deposited at various interfaces will be calculated numerically. The effects of the polarity of 128°Y-X LiNbO 3 on SAW characteristics are illustrated. By substituting the constituting relations into the Christoffel equations along with enforcing the appropriate boundary conditions on the interfaces, SAW characteristics of layered piezoelectric structures are determined by employing a matrix approach. Phase velocity and coupling coefficient of SAWs are presented versus h/λ, where h is the thickness of the AlN film and λ is the wavelength. Simulation results are compared with experimental data, which are calculated from S-parameter measurements of transversal SAW filters. A well matched comparison is demonstrated. Results obtained can be applied for the design of SAW devices using AlN/128°Y-X LiNbO 3 structures.

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Theoretical study on SAW characteristics of layered structures including a diamond layer

Cited by 203 publications

References 14 publications

Air Damping Analysis in Comb Microaccelerometer

Air Damping Analysis in Comb Microaccelerometer

Theoretical investigation of magnetoelectric surface acoustic wave characteristics of ZnO/Metglas layered composite

Propagation Characteristics of Surface Acoustic Waves in AlN/128° Y–X LiNbO₃ Structures

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Theoretical study on SAW characteristics of layered structures including a diamond layer

Cited by 203 publications

References 14 publications

Air Damping Analysis in Comb Microaccelerometer

Air Damping Analysis in Comb Microaccelerometer

Theoretical investigation of magnetoelectric surface acoustic wave characteristics of ZnO/Metglas layered composite

Propagation Characteristics of Surface Acoustic Waves in AlN/128° Y–X LiNbO3 Structures

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Product

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Propagation Characteristics of Surface Acoustic Waves in AlN/128° Y–X LiNbO₃ Structures