2005
DOI: 10.1109/led.2005.852524
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Thermal effects in suspended RF spiral inductors

Abstract: Abstract-Self-heating effects on integrated suspended and bulk spiral inductors are explored. A dc current is fed through the inductors during measurement to emulate dc and radio frequency power loss on the inductor. A considerable drop in by 18% at 36.5 mW is observed for suspended coils with 3-m aluminum metallization compared to reference inductors on bulk-Si. Simulations in Ansoft's ePhysics indicate that, due to the thermal isolation of the suspended coil, the power loss from resistive self-heating in the… Show more

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Cited by 11 publications
(6 citation statements)
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“…6(b). These phenomena may be mainly caused by the increase in the series resistance Rs, which will increase the ohmic loss and then degrade the quality factor [6,7].…”
Section: Experiments Results and Discussionmentioning
confidence: 99%
“…6(b). These phenomena may be mainly caused by the increase in the series resistance Rs, which will increase the ohmic loss and then degrade the quality factor [6,7].…”
Section: Experiments Results and Discussionmentioning
confidence: 99%
“…The self-heating of suspended coils degrades their RF performance by lowering their quality factor (Q) [20]. Fig.…”
Section: Detrimental Effects Of Self Heatingmentioning
confidence: 99%
“…As the integration of PAs is considered a viable direction by industry [1], it is important to study the compatibility of suspended inductors with power circuit integration. The most serious problem faced by suspended inductors in PA applications is self-heating due to the flow of a high dc or RF current [20]. The lack of an effective heat dissipation path, caused by the removal of the Si underneath the coil, leads to elevated temperatures inside the current carrying coil.…”
mentioning
confidence: 99%
“…This technological progress is known with the electronic feature size shrinking and the density growth. In parallel to this spectacular development, the undesired electromagnetic compatibility (EMC) effects [2][3][4][5] and the different environmental effects [6][7][8][9][10][11][12][13][14][15] such as the humidity and the thermal influence become more and more unavoidable. Therefore, these physical aspects should be considered during the design and the fabrication of modern electric-and electronic-circuits.…”
Section: Introductionmentioning
confidence: 99%