Thermal Properties of a Thin-Film Membrane Embedded in a Multiparameter Wind Sensor—On-Device Characterization Utilizing a Transient Measurement Approach

Beigelbeck, Roman; Ćerimović, Samir; Romero, Diego; Köhl, F.; Voglhuber-Brunnmaier, Thomas; Jakoby, Bernhard; Sauter, Thilo; Urban, G.

doi:10.1109/jsen.2015.2437992

Cited by 1 publication

(1 citation statement)

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“…Numerous unique flow transducer implementations have been published in the past [1,2,3,4,5,6,7,8,9,10,11,12,13,14,15,16,17,18,19,20,21,22,23,24,25,26,27,28,29,30,31] but reports on comprehensive exploration of the design space of a given technological approach are not available yet. We have investigated a total of twelve basic flow transducer designs, some of them including subsets, but all simulation models adhere to the aGe microthermistor technology.…”

Section: Methodsmentioning

confidence: 99%

FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout

Talic

Ćerimović

Beigelbeck

et al. 2019

Sensors

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This paper reports on a design and simulation study aiming at high-accuracy 2D micromachined thermal flow transducers. The scope is restricted to micromachined devices featuring a square-shaped membrane incorporating central symmetric thin-film devices. A microthermistor array probed spatial excess temperature variations while the main heat supply was alternatively established by optional heating resistors or by pronounced self-heating of the thermistor devices. Proper device designs enable leading edge transducer performance without sophisticated signal conditioning schemes. We found that a high azimuthal uniformity of flow magnitude transduction is tantamount to a precise azimuthal accuracy. The most advanced result gave a maximum azimuthal aberration of 0.17 and 1.7 degrees for 1 m/s and 10 m/s, respectively, while the corresponding magnitude uniformity amounted to 0.07% and 0.5%. Such excellent specifications exceed the need of ordinary meteorological applications by far. However, they are essential for, e.g., precise non-contact measurements of 2D relative movements of two quasi-planar surfaces via the related Couette flow in intermediate air gaps. The simulations predicted significantly better device characteristics than achieved by us in first experiments. However, this gap could be attributed to imperfect control of the flow velocity field by the measurement setup.

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