Thermal stability of submicrocrystalline copper strengthened with HfO2 nanoparticles in the temperature range 20–500 °C

Лебедев, А. Б.; Pul’nev, S. A.; Vetrov, V. V.; Burenkov, Yu. A.; Копылов, В. И.; Betekhtin, K. V.

doi:10.1134/1.1130509

Cited by 4 publications

(2 citation statements)

References 13 publications

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“…In the last years, the hafnium oxide (HfO 2 ) has been extensively investigated as an alternative material to replace the silicon dioxide employed in gate dielectric systems of microelectronic devices [ 5 - 9 ]. Moreover, this material has a wide potential for the fabrication of complementary metal–oxide–silicon transistors with small dimensions and/or liquid crystals because of its high-K dielectric constant, relatively low leakage current, wide band gap (5.70 eV), good thermal stability, and high transparency [ 10 - 15 ]. Recently, different nano-sized particle materials (gold, cobalt, platinum, and germanium) have been embedded into the HfO 2 matrix to improve the interfacial and electrical properties of metal–oxide–semiconductor capacitors [ 16 - 19 ].…”

Section: Introductionmentioning

confidence: 99%

Morphology and Photoluminescence of HfO2Obtained by Microwave-Hydrothermal

et al. 2009

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In this letter, we report on the obtention of hafnium oxide (HfO2) nanostructures by the microwave-hydrothermal method. These nanostructures were analyzed by X-ray diffraction (XRD), field-emission gum scanning electron microscopy (FEG-SEM), transmission electron microscopy (TEM), energy dispersive X-ray spectrometry (EDXS), ultraviolet–visible (UV–vis) spectroscopy, and photoluminescence (PL) measurements. XRD patterns confirmed that this material crystallizes in a monoclinic structure. FEG-SEM and TEM micrographs indicated that the rice-like morphologies were formed due to an increase in the effective collisions between the nanoparticles during the MH processing. The EDXS spectrum was used to verify the chemical compositional of this oxide. UV–vis spectrum revealed that this material have an indirect optical band gap. When excited with 488 nm wavelength at room temperature, the HfO2nanostructures exhibited only one broad PL band with a maximum at around 548 nm (green emission).

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Section: Introductionmentioning

confidence: 99%

Morphology and Photoluminescence of HfO2Obtained by Microwave-Hydrothermal

et al. 2009

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“…Deformation and fracture of perfect dislocation-free crystals depends on a density of point defects in the material. For example, annealing polycrystalline Cu with a grain size of 200 nm or less at 200 °С or higher results in a 10 -20 % change of the Young's modulus due to the change in the density of vacancies in the Cu grains [45]. At equilibrium, the density of intrinsic point defects in a single crystal is proportional to…”

Section: Resultsmentioning

confidence: 99%

Deformation and fracture of crystalline tungsten and fabrication of composite STM probes

et al. 2020

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Fracturing microscale constrictions in metallic wires, such as tungsten, platinum, or platinum-iridium, is a common fabrication method used to produce atomically sharp tips for scanning tunneling microscopy (STM), field-emission microscopy and field ion microscopy. Typically, a commercial polycrystalline drawn wire is locally thinned and then fractured by means of a dislocation slip inside the constriction. We examine a special case where a dislocation-free microscale constriction is created and fractured in a single crystal tungsten rod with a long side parallel to the [100] direction. In the absence of dislocations, vacancies become the main defects in the constriction which breaks under the tensile stress of approximately 10 GPa, which is close to the theoretical fracture strength for an ideal monocrystalline tungsten. We propose that the vacancies are removed early in the tensile test by means of deformation annealing, creating a defect-free tungsten constriction which cleaves along the W(100) plane. This approach enables fabrication of new composite STM probes which demonstrate excellent stability, atomic resolution and magnetic contrast that cannot be attained using conventional methods.

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