Thermal stability of tungsten sub-nitride thin film prepared by reactive magnetron sputtering

Zhang, X.X.; Wu, Yuan; Mu, Bo; Qiao, Li; Li, W.X.; Li, J.J.; Wang, P.

doi:10.1016/j.jnucmat.2016.12.009

Cited by 22 publications

(19 citation statements)

References 27 publications

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“…The binding energies of W4f7/2 and W4f5/2 peaks at 35.6 eV and 37.8 eV are assigned to the W-O state [30]. Fig 2(c) displays that the binding energies of N1s peaked at 396.9 eV, 397.7 eV and 399.8 eV, which can be assign to Cr-N and W-N binding states, respectively [25,28]. The O1s spectrum in Fig.…”

Section: Resultsmentioning

confidence: 94%

“…The binding energies of W4f 7/2 and W4f 5/2 peaks at 35.6 eV and 37.8 eV are assigned to the W-O state [30]. Figure 2c displays that the binding energies of N1s peaked at 396.9 eV, 397.7 eV and 399.8 eV, which can be assign to Cr-N and W-N binding states, respectively [25,28]. The O1s spectrum in Figure 2d shows that the binding energies of the O1s peaked at 530.1, 530.7 and 531.8 eV, which can be assign to Cr-O, W-O and H-O states, respectively [31][32][33].…”

Section: Resultsmentioning

confidence: 95%

“…Meanwhile, the binding energies of Cr2p3/2 and Cr2p1/2 peaks at 576.6 and 586.3 eV correspond to the Cr-O states [27]. The binding energies of W4f7/2 and W4f5/2 peaks located at 31.8 eV and 33.9 eV ( Figure. 2b), which are associated with W-N binding state [28,29]. The binding energies of W4f7/2 and W4f5/2 peaks at 35.6 eV and 37.8 eV are assigned to the W-O state [30].…”

Section: Resultsmentioning

confidence: 98%

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Thermal Stability of CrWN Glass Molding Coatings after Vacuum Annealing

Huang

Xie

et al. 2020

Coatings

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CrWN glass molding coatings were deposited by plasma enhanced magnetron sputtering (PEMS). The microstructure and thermal stability of these coatings were investigated by X-ray diffraction, X-ray photoelectron spectroscopy, scanning electron microscope, transmission electron microscope, atomic force microscope and nanoindentation tests. The as-deposited coating exhibited an aggravated lattice expansion resulting in a constant hardness enhancement. The vacuum annealing induced surface coarsening and the spinodal decomposition of the coating accompanied by the formation of nm-sized c-CrN, c-W 2 N, and h-WN domains. The annealed coating with low W content had mainly a face-centered cubic (f.c.c) matrix, strain fields caused by lattice mismatch caused hardness enhancement. Following an increase in W content, the annealed coating showed a mixed face-centered cubic (f.c.c) and hexagonal close-packed (h.c.p) matrix. The large volume fraction of h-WN phases seriously weakened the coating strengthening effect and caused an obvious drop in hardness.Coatings 2020, 10, 198 2 of 11 manufacturing due to their excellent anti-sticking and anti-oxidation properties [10][11][12], but they are also expensive for their wide industrial applications. Diamond-like carbon (DLC) films exhibit good self-lubrication and anti-wear performance, however, their poor thermal stability greatly limits any molding application [13,14]. Recently, the application of transition metal nitride coatings to glass molding has received great interest due to the favorable chemical inertness and anti-wear properties of these materials [15][16][17][18]. Most current studies focus on the anti-sticking and anti-oxidation properties of transition metal nitride coatings. WCrN coatings have been reported to have good anti-sticking properties at 400 • C, but also exhibited poor anti-sticking performances at 500 • C due to the formation of oxides [19]. CrWN coatings have been reported to experience severe mechanical degradation and coarsening in high temperature nitrogen atmosphere due to the formation of WO 3 phases [20].The life of glass molding coatings is determined mainly by their anti-sticking and anti-oxidation properties, as well as by their thermal stability. However, relatively little work has been published on the thermal stability of this type of coatings. In this study, CrWN coatings with different W contents are synthesized using PEMS. Detailed characterizations of these coatings were performed to study the evolution of their microstructures, as well as the mechanical properties of the as-deposited coatings after vacuum annealing. The potential effect of the W content on the thermal stability of the annealed coatings will be discussed systematically in the following sections.

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Section: Resultsmentioning

confidence: 94%

Section: Resultsmentioning

confidence: 95%

Section: Resultsmentioning

confidence: 98%

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Thermal Stability of CrWN Glass Molding Coatings after Vacuum Annealing

Huang

Xie

et al. 2020

Coatings

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show abstract

“…That made it a candidate for many potential applications such as Cu diffusion barrier into Si in semiconductor applications [3], wear resistance protective coatings on mechanical components [4], catalyst for nitrogen monoxide dissociation and reduction with hydrogen [5], photoelectrochemical hydrogen production [6] or deuterium diffusion barrier for plasma-facing components in nuclear fusion devices [7]. W N x thin films have frequently been prepared by reactive magnetron sputtering [4,7,8,9,10,11,12]. The formation of W N x is thermodynamically unfavorable, especially at atmospheric pressure.…”

Section: Introductionmentioning

confidence: 99%

“…Although thermodynamical predictions reported a thermal stability of W 2 N up to 2100 K [13], experimental investigations resulted in much lower N 2 release temperatures [10,11,12]. Shen et al [12] reported N 2 release for their films starting at about 1090 K and being fully released at 1170 K. W :N films deposited by Gao et al [11] showed an onset of N 2 desorption at 850 to 900 K and a release peak at 960 to 970 K. Finally, Zhang et al [10] reported an onset of N 2 release of their magnetron-sputter-deposited W 2 N layers at about 600 K continuously increasing and reaching a maximum release rate at about 1200 K. For higher temperatures the release rate dropped strongly to very low values. Obviously the layer decomposed at 1200 K. Furthermore, a dramatic degradation of the layers properties happened at temperatures of about 900 K [4].…”

Section: Introductionmentioning

confidence: 99%