A thermal-mechanical coupled finite element analysis model of solder joints is established, which plays a role in mechanical support and electrical connection in flip chip. Periodic temperature cycle load (-45 ~125 ) applied on the solder joints and it will generate periodic internal stress and strain in the process of the temperature cycling. With repeat using, the solder joints will produce deformation, and then cracks, extension, interlayer delaminating. The failure of the solder joints may cause the failure of the entire switch. This paper aims to simulate the periodic changes in temperature and obtain the reliability and potential failure modes of solder joints under temperature cycling, thus providing theory reference for the design and application of the novel solid MEMS switch.