Thermo-mechanical transduction suitable for high-speed scanning probe imaging and lithography

Angelov, Tihomir; Roeser, D; Ivanov, Tzvetan; Gutschmidt, Stefanie; Sattel, Thomas; Rangelow, Ivo W.

doi:10.1016/j.mee.2016.01.005

Cited by 25 publications

(17 citation statements)

References 19 publications

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“…Patterning is performed in different ways, such as mechanical scratching, local heating, and field emission [124]. Probes based on electrothermal bimorphs have been used for AFM [125], SPN [124], and combined functionality systems [113,126]. For fast imaging of a large surface, an array setup is desirable.…”

Section: Applications Of Bimorph Actuatorsmentioning

confidence: 99%

Review of Electrothermal Actuators and Applications

2019

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This paper presents a review of electrothermal micro-actuators and applications. Electrothermal micro-actuators have been a significant research interest over the last two decades, and many different designs and applications have been investigated. The electrothermal actuation method offers several advantages when compared with the other types of actuation approaches based on electrostatic and piezoelectric principles. The electrothermal method offers flexibility in the choice of materials, low-cost fabrication, and large displacement capabilities. The three main configurations of electrothermal actuators are discussed: hot-and-cold-arm, chevron, and bimorph types as well as a few other unconventional actuation approaches. Within each type, trends are outlined from the basic concept and design modifications to applications which have been investigated in order to enhance the performance or to overcome the limitations of the previous designs. It provides a grasp of the actuation methodology, design, and fabrication, and the related performance and applications in cell manipulation, micro assembly, and mechanical testing of nanomaterials, Radio Frequency (RF) switches, and optical Micro-Electro-Mechanical Systems (MEMS).

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Section: Applications Of Bimorph Actuatorsmentioning

confidence: 99%

Review of Electrothermal Actuators and Applications

2019

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“…28 Due to tailoring of the material properties of the probes, a static displacement in range of 10 lm has been realized. 14 This was achieved by decreasing of the silicon layer thickness, combined with an enhancement of the thermal expansion coefficient of the actuator material (Al þ Mg). The boosted thermal expansion mismatch leads to increased actuation efficiencies, but also to amplified cross-sensitivities with respect to environmental temperature fluctuations.…”

Section: Determination Of Piezoresistive Read-out Noisementioning

confidence: 99%

“…48,49 Lithographic processes, which are spatially confined to the sub-10 nm scale are yielded by the highly localized electric field and the use of tip-sample distances well below 100 nm. Based on the thermomechanically actuated, piezoresistive, so called active cantilever technology 14,50 a scanning probe lithography 06G101-7 Rangelow et al: Active scanning probes 06G101-7 platform 18,50 able to image, inspect, align and pattern features at the single-digit nanoregime was developed. A corresponding example, patterned in positive tone developmentless mode, is summarized in Fig.…”

Section: E Field Emission Scanning Probe Lithographymentioning

confidence: 99%

“…Here, the system is even capable to measure the thermo-mechanical noise of the cantilever. 14 The progress of active cantilever development has resulted in a significant downscaling of the cantilever system, which is linked to a reduction in cantilever mass and increase of resonance frequency (f c ) to spring constant (k c ) ratio, summarized in Fig. 1.…”

Section: Introductionmentioning

confidence: 99%

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Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication

Rangelow

Ivanov

Ahmad

et al. 2017

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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With the recent advances in the field of nanotechnology, measurement and manipulation requirements at the nanoscale have become more stringent than ever before. In atomic force microscopy, high-speed performance alone is not sufficient without considerations of other aspects of the measurement task, such as the feature aspect ratio, required range, or acceptable probe-sample interaction forces. In this paper, the authors discuss these requirements and the research directions that provide the highest potential in meeting them. The authors elaborate on the efforts toward the downsizing of self-sensed and self-actuated probes as well as on upscaling by active cantilever arrays. The authors present the fabrication process of active probes along with the tip customizations carried out targeting specific application fields. As promising application in scope of nanofabrication, field emission scanning probe lithography is introduced. The authors further discuss their control and design approach. Here, microactuators, e.g., multilayer microcantilevers, and macroactuators, e.g., flexure scanners, are combined in order to simultaneously meet both the range and speed requirements of a new generation of scanning probe microscopes.

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“…In this case, a spring beam integrates a microheater. When the microheater is electrically biased, due to thermal expansion coefficients of various materials forming the cantilever, the entire structure starts to displace [4]. This way deflection in the frequency range of up to several MHz can be induced [5].…”

Section: Introductionmentioning

confidence: 99%

Optimal design of electromagnetically actuated MEMS cantilevers

Barba¹,

Gotszalk²,

Majstrzyk³

et al. 2018

Preprint

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In this paper we present the numerical and experimental results of a design optimization of electromagnetic cantilevers. In particular, a cost-effective technique of evolutionary computing enabling the simultaneous minimization of multiple criteria is applied. A set of optimal solutions are subsequently fabricated and measured. The designed structures are fabricated in arrays, which makes the comparison and measurements of the sensor properties reliable. The microfabrication process, based on the silicon on insulator (SOI) technology, is proposed in order to minimize parasitic phenomena and enable efficient electromagnetic actuation. Measurements on the fabricated prototypes assessed the proposed methodological approach.

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Thermo-mechanical transduction suitable for high-speed scanning probe imaging and lithography

Cited by 25 publications

References 19 publications

Review of Electrothermal Actuators and Applications

Review of Electrothermal Actuators and Applications

Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication

Optimal design of electromagnetically actuated MEMS cantilevers

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