Optimal design of electromagnetically actuated MEMS cantilevers

Barba, Paolo Di; Gotszalk, Teodor; Majstrzyk, Wojciech; Mognaschi, Maria Evelina; Orłowska, Karolina; Sierakowski, Andrzej

doi:10.20944/preprints201806.0493.v1

Cited by 4 publications

(1 citation statement)

References 23 publications

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“…The magnetic microsensors utilizing the commercial 0.35 μm CMOS process has been investigated [ 110 ]. In a further contribution, Barba et al [ 111 ] designed an electromagnetically actuated MEMS cantilevers proposed in order to minimize parasitic phenomena using Boron-doped silicon. In another seminal work, an electromagnetic and Piezoelectric actuated and piezoresistive sensed CMOS- MEMS device has been modelled for humidity sensing using ZnO NRs (6 μm/chitosan SAMs) as a sensing material [ 83 ].…”

Section: Actuation Techniquesmentioning

confidence: 99%

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

et al. 2021

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Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.

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Section: Actuation Techniquesmentioning

confidence: 99%

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

et al. 2021

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Many Objective Optimization of a Magnetic Micro–Electro–Mechanical (MEMS) Micromirror with Bounded MP-NSGA Algorithm

2020

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The paper proposes the automated optimal design of a class of micro–electro–mechanical (MEMS) devices, based on a procedure of finite element analysis coupled to evolutionary optimization algorithms. A magnetic MEMS, used as an optical switch, is considered as the case study. In particular, the geometry of the device is optimized in order to maximize the actuation torque and minimize the power losses and the device volume. The optimization algorithms belong to the genetic class and, in particular, Migrated Parents - Non-Dominated Sorting Genetic Algorithm MP-NSGA, with three objective functions, is compared to NSGA-III.

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A 2D Membrane MEMS Device Model with Fringing Field: Curvature-Dependent Electrostatic Field and Optimal Control

2021

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An important problem in membrane micro-electric-mechanical-system (MEMS) modeling is the fringing-field phenomenon, of which the main effect consists of force-line deformation of electrostatic field E near the edges of the plates, producing the anomalous deformation of the membrane when external voltage V is applied. In the framework of a 2D circular membrane MEMS, representing the fringing-field effect depending on ?|∇u|2 with the u profile of the membrane, and since strong E produces strong deformation of the membrane, we consider |E| proportional to the mean curvature of the membrane, obtaining a new nonlinear second-order differential model without explicit singularities. In this paper, the main purpose was the analytical study of this model, obtaining an algebraic condition ensuring the existence of at least one solution for it that depends on both the electromechanical properties of the material constituting the membrane and the positive parameter δ that weighs the terms ?|∇u|2. However, even if the the study of the model did not ensure the uniqueness of the solution, it made it possible to achieve the goal of finding a stable equilibrium position. Moreover, a range of admissible values of V were obtained in order, on the one hand, to win the mechanical inertia of the membrane and, on the other hand, to ensure that the membrane did not touch the upper disk of the device. Lastly, some optimal control conditions based on the variation of potential energy are presented and discussed.

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Optimal design of electromagnetically actuated MEMS cantilevers

Cited by 4 publications

References 23 publications

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Many Objective Optimization of a Magnetic Micro–Electro–Mechanical (MEMS) Micromirror with Bounded MP-NSGA Algorithm

A 2D Membrane MEMS Device Model with Fringing Field: Curvature-Dependent Electrostatic Field and Optimal Control

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