1973
DOI: 10.1021/ac60330a034
|View full text |Cite
|
Sign up to set email alerts
|

Thermodynamic approach to the quantitative interpretation of sputtered ion mass spectra

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2

Citation Types

1
79
0
1

Year Published

1998
1998
2014
2014

Publication Types

Select...
6
2

Relationship

0
8

Authors

Journals

citations
Cited by 424 publications
(81 citation statements)
references
References 20 publications
1
79
0
1
Order By: Relevance
“…Even though the chemical compositions of silicate glasses are appreciably different from calcium carbonate, the decreasing trend with the ionization potential is similar. There may be some physical mechanism, such as the LTE model, 29 which can explain the relationship observed in Fig. 4, irrespective of the chemical compositions (matrix effect).…”
Section: Secondary-ion Yieldsmentioning
confidence: 98%
See 1 more Smart Citation
“…Even though the chemical compositions of silicate glasses are appreciably different from calcium carbonate, the decreasing trend with the ionization potential is similar. There may be some physical mechanism, such as the LTE model, 29 which can explain the relationship observed in Fig. 4, irrespective of the chemical compositions (matrix effect).…”
Section: Secondary-ion Yieldsmentioning
confidence: 98%
“…Based on the local thermal equilibrium (LTE) model 29 as applied to secondary ion production by 16 O -ion bombardment, the following equation 30 is derived:…”
Section: Secondary-ion Yieldsmentioning
confidence: 99%
“…Probably the most well known is the method whose model assumes the plasma to be in local thermodynamic equilibrium (LTE). 1,2 In this method, the secondary ion yield is expressed using two parameters: the plasma temperature and the electron density. Their values must be obtained from the ion intensities of two elements included in the sample and whose concentrations are known (internal standards).…”
mentioning
confidence: 99%
“…As opposed to elastic processes, inelastic collisions from projectile impacts can induce electronic excitation, resulting in the formation of localized heat (or what is defined as a thermal spike model) 30 . Sputtering of this nature is regarded as kinetically assisted potential sputtering, where the initial impact to generate the concerted, non-linear motion leading to emission contributes energy to generate the thermal spike [30][31] .…”
Section: Ion-solid Interaction Sputtering and Dependence On Size Andmentioning
confidence: 99%
“…Sputtering of this nature is regarded as kinetically assisted potential sputtering, where the initial impact to generate the concerted, non-linear motion leading to emission contributes energy to generate the thermal spike [30][31] . Factors influencing the occurrence of such elastic or inelastic collisions have been strongly correlated to the projectile cross-section, the energy per constituent distributed on the projectile upon impact (if considering clusters), and the molecular forces holding these projectiles together 32,33,20 .…”
Section: Ion-solid Interaction Sputtering and Dependence On Size Andmentioning
confidence: 99%