We propose an in-situ UV-vis monitoring technique called 'oxynitrogenography' as an approach towards the controlled and reproducible synthesis of thin films of different Ta-O-N phases, including the elusive β-TaON phase. The optical absorption changes are measured during annealing of the film at increasing NH 3 /H 2 O ratios, and can be directly correlated to the presence of different phases (Ta 2 O 5 , β-TaON, mixed TaON-Ta 3 N 5 , Ta 3 N 5 ) due to the abrupt change in the absorption edge. After additional XRD analysis, the thermodynamic equilibrium conditions to obtain these various phases are determined, and a phase diagram is constructed. We observe that there is a very narrow range of parameters for the thermodynamic stability of the β-TaON phase. We observe that the carrier mobility increases with the nitrogen content in the sample, from 10 -5 cm 2 /Vs in Ta 2 O 5 , to 10 -2 cm 2 /Vs in β-TaON and the mixed TaON-Ta 3 N 5 , until 10 -1 cm 2 /Vs in Ta 3 N 5 . While the carrier mobility of β-TaON and Ta 3 N 5 is comparable to that of BiVO 4 , the lifetime in the order of milliseconds is comparable to that of crystalline silicon. This is much higher than previously reported and compares favorably with the currently most promising metal oxide-based semiconductors (BiVO 4 , Fe 2 O 3 , WO 3 , Cu 2 O) for photo-electrochemical (PEC) water splitting. Although these long lifetimes may be partly caused by (de-)trapping from shallow trap states, these results clearly demonstrate that a high phase purity is an essential prerequisite for efficient (oxy)nitride-based absorber materials.