Thickness distribution peculiarities of DLS –films obtained by method of pulse laser precipitation

Abstract

One of the promising methods of thin film manufacturing is a method of pulse laser precipitation. By virtue of energetic peculiarities of laser impact upon a target this method is widely used at the formation of diamond-like structures. The manufacture of diamond-like structures on laser plant PLD-400 with the use of an excimer transmitter is described. Through the method of ellipsometry there is investigated a growth rate and peculiarities of thickness distribution under different conditions of precipitation.