Thickness-modulated metal–insulator transition of VO2 film grown on sapphire substrate by MBE

Bian, Jiming; Wang, Minhuan; Sun, Hongjun; Liu, Hongzhu; Li, Xiaoxuan; Luo, Yi; Zhang, Yuzhi

doi:10.1007/s10853-016-9863-1

Cited by 34 publications

(12 citation statements)

References 17 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Moreover, as the film thickness increased from S1 to S3, the resistivity in both the insulator and metallic phase decreased remarkably, while the amplitude ΔA increased slightly (as shown in the inset of Figure 4 ). The dependence of the MIT properties of VO 2 film on film thickness was supposed to be associated with tensile strain relaxation with increasing thickness; the detailed mechanism has been discussed and elucidated in our previous report [ 10 , 13 ]. What is more, it would also be related to the surface composition of the VO 2 thin film, which would be confirmed later by XPS analysis.…”

Section: Resultsmentioning

confidence: 99%

See 1 more Smart Citation

VO2 Thermochromic Films on Quartz Glass Substrate Grown by RF-Plasma-Assisted Oxide Molecular Beam Epitaxy

et al. 2017

View full text Add to dashboard Cite

Vanadium dioxide (VO2) thermochromic thin films with various thicknesses were grown on quartz glass substrates by radio frequency (RF)-plasma assisted oxide molecular beam epitaxy (O-MBE). The crystal structure, morphology and chemical stoichiometry were investigated systemically by X-ray diffraction (XRD), atomic force microscopy (AFM), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) analyses. An excellent reversible metal-to-insulator transition (MIT) characteristics accompanied by an abrupt change in both electrical resistivity and optical infrared (IR) transmittance was observed from the optimized sample. Remarkably, the transition temperature (TMIT) deduced from the resistivity-temperature curve was reasonably consistent with that obtained from the temperature-dependent IR transmittance. Based on Raman measurement and XPS analyses, the observations were interpreted in terms of residual stresses and chemical stoichiometry. This achievement will be of great benefit for practical application of VO2-based smart windows.

show abstract

Section: Resultsmentioning

confidence: 99%

“…In Shenzhen, Shenzhen, China). Details of the deposition process have been reported in our previous papers [ 10 , 13 ]. All of the parameters, such as substrate temperature, chamber pressure, and metallic vanadium evaporation rate, as well as the O 2 flux rate, were optimized for high quality VO 2 films.…”

Section: Methodsmentioning

confidence: 99%

VO2 Thermochromic Films on Quartz Glass Substrate Grown by RF-Plasma-Assisted Oxide Molecular Beam Epitaxy

et al. 2017

View full text Add to dashboard Cite

show abstract

“…The weaker intensity peaks in 6H-SiC are an E2 planar acoustic mode at 147 cm −1 [21]. The data in Figure 2a,b show the room temperature M1 phase Raman spectrum of VO 2 /6H-SiC films at 143 (Bg), 191 (Ag), 222 (Ag), 260 (Bg), 307 (Bg), 335 (Ag), 385 (Ag) , 439 (Bg), 497 (Ag) and 612 cm −1 (Ag) [22]. Meanwhile, no other peaks were observed, which proved that high quality VO 2 films can be grown on 6H-SiC substrate.…”

Section: Resultsmentioning

confidence: 99%

Enhanced Phase Transition Properties of VO2 Thin Films on 6H-SiC (0001) Substrate Prepared by Pulsed Laser Deposition

Cheng

Gao

et al. 2019

Nanomaterials

View full text Add to dashboard Cite

For growing high quality epitaxial VO2 thin films, the substrate with suitable lattice parameters is very important if considering the lattice matching. In addition, the thermal conductivity between the substrate and epitaxial film should be also considered. Interestingly, the c-plane of hexagonal 6H-SiC with high thermal conductivity has a similar lattice structure to the VO2 (010), which enables epitaxial growth of high quality VO2 films on 6H-SiC substrates. In the current study, we deposited VO2 thin films directly on 6H-SiC (0001) single-crystal substrates by pulsed laser deposition (PLD) and systematically investigated the crystal structures and surface morphologies of the films as the function of growth temperature and film thickness. With optimized conditions, the obtained epitaxial VO2 film showed pure monoclinic phase structure and excellent phase transition properties. Across the phase transition from monoclinic structure (M1) to tetragonal rutile structure (R), the VO2/6H-SiC (0001) film demonstrated a sharp resistance change up to five orders of magnitude and a narrow hysteresis width of only 3.3 °C.

show abstract

“…Various techniques have been developed to form VO 2 thin films, for instance, molecular beam epitaxy [7], pulsed laser deposition [8], magnetron sputtering [9], and chemical vapor deposition [10]. Over the past decades, high-quality VO 2 thin films with the single crystalline characteristics have been seeking because of the impact on MIT features.…”

Section: Introductionmentioning

confidence: 99%

Enhanced Thermochromic Properties of Vanadium Dioxide (VO2)/Glass Heterostructure by Inserting a Zr-Based Thin Film Metallic Glasses (Cu50Zr50) Buffer Layer

et al. 2018

View full text Add to dashboard Cite

Vanadium dioxide (VO2) with reversible metal–insulator transition (MIT) is one of the most promising energy-efficient materials. Especially for VO2-based smart windows, the visible transmittance and solar modulation ability are the most critical parameters. However, VO2 thin films that are directly deposited onto glass substrates are of poor crystallinity and MIT performance, limiting the practical applications of VO2/glass heterostructures. In this paper, a buffer layer of Cu50Zr50 was introduced to build a novel Zr-based thin film metallic glass (VO2/Cu50Zr50/glass) with multilayer structures for thermochromic applications. It is observed that the insertion of a Cu50Zr50 buffer layer with appropriate thickness results in a clear enhancement of crystalline quality and MIT performance in the VO2/Cu50Zr50/glass thin films, compared with the single-layer VO2/glass thin films. Moreover, the VO2/Cu50Zr50/glass bi-layer films exhibit better optical performance with enhanced solar modulation ability (ΔTsol = 14.3%) and a high visible transmittance (Tvis = 52.3%), which represents a good balance between ΔTsol and Tvis for smart window applications.

show abstract

Thickness-modulated metal–insulator transition of VO2 film grown on sapphire substrate by MBE

Cited by 34 publications

References 17 publications

VO2 Thermochromic Films on Quartz Glass Substrate Grown by RF-Plasma-Assisted Oxide Molecular Beam Epitaxy

VO2 Thermochromic Films on Quartz Glass Substrate Grown by RF-Plasma-Assisted Oxide Molecular Beam Epitaxy

Enhanced Phase Transition Properties of VO2 Thin Films on 6H-SiC (0001) Substrate Prepared by Pulsed Laser Deposition

Enhanced Thermochromic Properties of Vanadium Dioxide (VO2)/Glass Heterostructure by Inserting a Zr-Based Thin Film Metallic Glasses (Cu50Zr50) Buffer Layer

Contact Info

Product

Resources

About