Abstract:A Monte-Carlo computer simulation code was developed to study grain growth characteristics during thin film deposition. The simulation algorithm was based on the minimization of the sum of the anisotropic surface energy and grain boundary energy. The average grain size and the surface roughness of the plated layer increased rapidly with the thickness of deposition, but the rate of the increase diminished with large thickness. In the simulation, it was found that the surface energy term dominated over the grain… Show more
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