2018
DOI: 10.1007/s10825-018-1285-7
|View full text |Cite
|
Sign up to set email alerts
|

Threshold voltage modeling for a Gaussian-doped junctionless FinFET

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2020
2020
2023
2023

Publication Types

Select...
7

Relationship

0
7

Authors

Journals

citations
Cited by 10 publications
(2 citation statements)
references
References 22 publications
0
2
0
Order By: Relevance
“…This design choice implies a more complex fabrication process with respect to the bulk structure [5]. The designer could follow different approaches in order to optimize junctionless FinFETs: work function engineering of the gate to reduce I o f f (by changing the gate work function from 4.5 eV to 5.4 eV, I o f f can be reduced by five order of magnitudes) [7]; spacer engineering to improve performance (e.g., dual-k spacers architecture can provide an improvement in I on by 72.5% and in DIBL by 37.8%) [9]; doping engineering by using a Gaussian doped channel, which can lead to an increase in I on by 21.1% [10,13], or a lightly doped channel, which allows for better gate control on the device [11]; gate oxide engineering to provide higher performance (in terms of I on /I o f f and DIBL) by the implementation of complex hetero gate oxide structures [8]. For example, the double hetero gate oxide (DHGO) presented in Figure 9 can obtain a higher I on /I o f f with respect to conventional and triple/quadruple hetero gate oxide (THGO/QHGO) structures.…”
Section: Finfetmentioning
confidence: 99%
“…This design choice implies a more complex fabrication process with respect to the bulk structure [5]. The designer could follow different approaches in order to optimize junctionless FinFETs: work function engineering of the gate to reduce I o f f (by changing the gate work function from 4.5 eV to 5.4 eV, I o f f can be reduced by five order of magnitudes) [7]; spacer engineering to improve performance (e.g., dual-k spacers architecture can provide an improvement in I on by 72.5% and in DIBL by 37.8%) [9]; doping engineering by using a Gaussian doped channel, which can lead to an increase in I on by 21.1% [10,13], or a lightly doped channel, which allows for better gate control on the device [11]; gate oxide engineering to provide higher performance (in terms of I on /I o f f and DIBL) by the implementation of complex hetero gate oxide structures [8]. For example, the double hetero gate oxide (DHGO) presented in Figure 9 can obtain a higher I on /I o f f with respect to conventional and triple/quadruple hetero gate oxide (THGO/QHGO) structures.…”
Section: Finfetmentioning
confidence: 99%
“…Recently, the JLMOSFETs have received significant attention for their technological feasibility and theoretical modeling. In the last decades, several device architectures for JLMOSFETs were proposed, such as Thin Film JLMOSFET [5], [6], FinFET [7], [8], Tunnel FET [9], [10], gate-all-around (GAA) FET [11], [12], singlegate JLT (SG-JLT) [13], [14], double-gate JLMOSFETs (DG-JLMOSFETs) [15]- [18], etc. The DG-JLMOSFETs are becoming more promising due to their superior performances in high speed and low power applications [19].…”
Section: Introductionmentioning
confidence: 99%