Tip-based nanofabrication: an approach to true nanotechnology

Abstract

True nanotechnology, defined as the ability to reliably and repeatably fabricate nanostructures with controlled differences in size, shape, and orientation at precise substrate locations, currently does not exist. There are many examples demonstrating the capability to grow, deposit, and manipulate nanometer-sized features, but typically these techniques do not allow for controllable manufacturing of individual structures. To bridge this gap and to unlock the true potential of nanotechnology for defense sensing applications, the Defense Advanced Research Projects Agency (DARPA) launched the Tip-Based Nanofabrication (TBN) research program with the intent of achieving controlled manufacturing of nanostructures using functionalized AFM cantilevers and tips. This work describes the background, goals, and recent advances achieved during the multi-year TBN program.

Tip-Based Nanofabrication for Scalable Manufacturing

“…TBN uses a physical probe in contact or in close proximity to a surface to modify the surface using thermal, mechanical, or electrical fields. Furthermore, some TBN techniques have the potential to become truly controlled approaches for manufacturing nanostructures and nanoscale devices for the upcoming decades [ 20 ].…”

Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

“…Technical implementation of such new structuring technologies in large areas has so far obviously failed because of a lack of adequate measurement and positioning technology that spans from subnanometers to several centimeters. The difficulties and challenges with regard to precision, reproducibility, dynamics, and stability are well known [7,24]. Still, there is a great need for research into the flexible, cross-scale, and at the same time cost-effective production of complex nanoscale structures, even in smaller quantities.…”

“…Thus, tip-based fabrication is a promising technology to manufacture features smaller than a characteristic size of 10 nm. Current solutions for AFM tip-based nanofabrication are usually limited by structuring ranges in the micrometer range [7,23,25]. At the same time, the challenges with respect to precision, reproducibility, longterm and short-term stability, dynamics and others are well known [7,24].…”

“…Current solutions for AFM tip-based nanofabrication are usually limited by structuring ranges in the micrometer range [7,23,25]. At the same time, the challenges with respect to precision, reproducibility, longterm and short-term stability, dynamics and others are well known [7,24]. As a result, there is a need to research the combination of these nanofabrication technologies with adequate nanopositioning and nanometrology for a flexible, cross-scale fabrication of complex nanoscale structures.…”

“…Here, tip-based nanofabrication processes, which already enable structuring in the sub-10-nm range, offer great potential. However, these processes have only been demonstrated in small processing areas (a few 100 μm 2 ), at low speeds and with limited precision [7]. Certain optical processes allow for sub-wavelength structuring [8,9], though only in the sense of functionalized, plane surfaces.…”