Toggle switch: investigations of an RF MEMS switch for power applications

Simon, Winfried; Mack, T.; Schauwecker, B.; Strohm, K.M.; Luy, J.-F.

doi:10.1049/ip-map:20045133

Cited by 8 publications

(2 citation statements)

References 11 publications

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“…However no reliability tests have been reported yet to validate such a design for long-term actuation. Alternatively, a toggle or push–pull mechanism has been implemented in [10] by anchoring a cantilever by means of torsion springs. However high control of the stress gradient is required in the suspended structures in order to preserve their electro-mechanical performances.…”

Section: Introductionmentioning

confidence: 99%

Design and characterization of an active recovering mechanism for high-performance RF MEMS redundancy switches

Solazzi

Tazzoli

Farinelli³

et al. 2011

Int. J. Microw. Wireless Technol.

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This paper presents the design and characterization of an active push/pull toggle RF micro-electro-mechanical systems (MEMS) switch for satellite redundancy networks. The actively controlled pull-up mechanism allows for extended restoring capabilities of the switch in case of ON-state stiction. As a proof of concept an active push/pull MEMS capacitive switch was modeled, designed, and manufactured in shunt configuration on a 50 Ω coplanar transmission line. RF measurement results show a return loss better than 15 dB in the 0.1–40 GHz range and an insertion loss better than 0.5 dB over the same range. The restoring capability of the switch was experimentally proved up to 9 h, and a predictive model was proposed for the estimation of the switch time to failure.

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Section: Introductionmentioning

confidence: 99%

Design and characterization of an active recovering mechanism for high-performance RF MEMS redundancy switches

Solazzi

Tazzoli

Farinelli³

et al. 2011

Int. J. Microw. Wireless Technol.

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“…To address this problem, numerous studies to date have focused on enhancing the contact performance of MEMS relays through structural, circuitry, and material approaches [10]- [22]. Along with the previous methods, the authors used a stacked/meshed electrode structure with a soft insulating layer that presents extremely low contact resistance for reduced Joule heating and thereby resulted in more reliable operation [4], [23].…”

mentioning

confidence: 99%

A Highly Reliable Two-Axis MEMS Relay Demonstrating a Novel Contact Refresh Method

Song

Yoon

2015

J. Microelectromech. Syst.

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This paper reports on a two-axis actuated microelectromechanical systems (MEMS) relay to realize a unique contact-refresh concept. In comparison with all other conventional MEMS relays utilizing only several designated contact spots during their whole lifetime, the proposed concept can change the real contact spots (asperities) by altering the lateral position of contact asperities, thus providing highly reliable contact endurance. In addition, it can enhance lifetime of the switches that fail by contact resistance increase, and potentially even for switches that fail by contact stiction if the contact position is changed before a critical number of switching cycles is reached; however, the device inevitably has a relatively large device area and additional control circuitry in this stage of development. The fabricated relays showed vertical actuation voltages under 40 V, a switching delay of 190 µs, and a maximum lateral displacement of 10 µm. Owing to the suggested contact-refresh scheme, the total contact endurance in one switching device was dramatically increased, and the sum of dozens of lifetimes measured at the selected lateral positions reached 6 × 10 7 cycles at 100 mA in hot switching conditions (Au-to-Au contact), which is nearly 50 times higher than the average value of the measured lifetimes in a designated contact spot.[2014-0225]

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Reduction of squeeze-film damping in a wafer-level encapsulated RF MEMS DC shunt switch

Ke¹,

Miao

Tan

2011

Sensors and Actuators A: Physical

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Toggle switch: investigations of an RF MEMS switch for power applications

Cited by 8 publications

References 11 publications

Design and characterization of an active recovering mechanism for high-performance RF MEMS redundancy switches

Design and characterization of an active recovering mechanism for high-performance RF MEMS redundancy switches

A Highly Reliable Two-Axis MEMS Relay Demonstrating a Novel Contact Refresh Method

Reduction of squeeze-film damping in a wafer-level encapsulated RF MEMS DC shunt switch

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