NDIR CO
2
gas sensors using a 10-cm-long gas
channel
and CMOS-compatible 12% doped ScAlN pyroelectric detector have previously
demonstrated detection limits down to 25 ppm and fast response time
of ∼2 s. Here, we increase the doping concentration of Sc to
20% in our ScAlN-based pyroelectric detector and miniaturize the gas
channel by ∼65× volume with length reduction from 10 to
4 cm and diameter reduction from 5 to 1 mm. The CMOS-compatible 20%
ScAlN-based pyroelectric detectors are fabricated over 8-in. wafers,
allowing cost reduction leveraging on semiconductor manufacturing.
Cross-sectional TEM images show the presence of abnormally oriented
grains in the 20% ScAlN sensing layer in the pyroelectric detector
stack. Optically, the absorption spectrum of the pyroelectric detector
stack across the mid-infrared wavelength region shows ∼50%
absorption at the CO
2
absorption wavelength of 4.26 μm.
The pyroelectric coefficient of these 20% ScAlN with abnormally oriented
grains shows, in general, a higher value compared to that for 12%
ScAlN. While keeping the temperature variation constant at 2 °C,
we note that the pyroelectric coefficient seems to increase with background
temperature. CO
2
gas responses are measured for 20% ScAlN-based
pyroelectric detectors in both 10-cm-long and 4-cm-long gas channels,
respectively. The results show that for the miniaturized CO
2
gas sensor, we are able to measure the gas response from 5000 ppm
down to 100 ppm of CO
2
gas concentration with CO
2
gas response time of ∼5 s, sufficient for practical applications
as the average outdoor CO
2
level is ∼400 ppm. The
selectivity of this miniaturized CO
2
gas sensor is also
tested by mixing CO
2
with nitrogen and 49% sulfur hexafluoride,
respectively. The results show high selectivity to CO
2
with
nitrogen and 49% sulfur hexafluoride each causing a minimum ∼0.39%
and ∼0.36% signal voltage change, respectively. These results
bring promise to compact and miniature low cost CO
2
gas
sensors based on pyroelectric detectors, which could possibly be integrated
with consumer electronics for real-time air quality monitoring.