Properly treating uncertainty is critical for robust system sizing of nearly/net zero energy buildings (ZEBs). To treat uncertainty, the conventional method conducts Monte Carlo simulations for thousands of possible design options, which inevitably leads to computation load that is heavy or even impossible to handle. In order to reduce the number of Monte Carlo simulations, this study proposes a response-surface-modelbased system sizing method. The response surface models of design criteria (i.e., the annual energy match ratio, self-consumption ratio and initial investment) are established based on Monte Carlo simulations for 29 specific design points which are determined by Box-Behnken design. With the response surface models, the overall performances (i.e., the weighted performance of the design criteria) of all design options (i.e., sizing combinations of photovoltaic, wind turbine and electric storage) are evaluated, and the design option with the maximal overall performance is finally