Towards the Monolithic Integration of Converter Circuitry and Piezoelectric MEMS Energy Harvesters

Duque, Marcos; Leon-Salguero, Edgardo; Sacristán, J.; Estéve, J.; Murillo, Gonzalo

doi:10.3390/proceedings2131512

Cited by 3 publications

(3 citation statements)

References 4 publications

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“…Jordan et al [20] found that when the duty cycle is extremely large, once a 100% duty cycle occurs in a certain cycle, when the next cycle comes, because the switch tube continues to conduct, the sampling current always exists, and the superimposed level drops. If the ramp current is too small compared to the sampling current, the superimposed level bath will quickly reach the error voltage VC within a very short time at the beginning of the next cycle [21], and the switch will be turned off, making the cycle duty cycle smaller. Due to the long conduction time of the freewheel, the inductor current will drop sharply [22], which will lead to continuous conduction in subsequent cycles to maintain the output voltage stability.…”

Section: Related Workmentioning

confidence: 99%

Application of DC-DC Converter in Sensor and MEMS Device Integration and Packaging

2022

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DC-DC (direct current controlled direct current) converter is the core control circuit in the field of power electronics technology. Based on the theory of sensors and MEMS (microelectromechanical systems), this paper constructs a DC-DC converter device integration and packaging model and proposes an enhanced current equalization technology with offset correction function suitable for two-phase DC-DC converters. Aiming at the generation mechanism of the output ripple of the two-phase DC-DC converter, the model adopts the ripple elimination technology based on the interleaved synchronous clock and the self-calibration interleaved time generator, so that each phase of the converter is accurately staggered within the full-load range, and the problem of output ripple amplitude is solved. During the simulation process, a high-performance two-phase DC-DC converter chip is designed and implemented, which includes an adaptive on-time control logic based on ripple feedback, a self-calibrating zero-current turn-off circuit, and a robust power switch transistor drive logic. The experimental results show that the full-load current of the chip reaches 6A, the peak efficiency is 91%, the phase-to-phase current error is <0.6%, and the output ripple is <9 mV. In the 90.265 V AC input, 0-10 W load range, the output voltage error is less than 0.96%, when the load is switched between no-load and full-load, and the system response speed is less than 200 ps, which effectively improves the overall performance of the DC-DC converter.

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Section: Related Workmentioning

confidence: 99%

Application of DC-DC Converter in Sensor and MEMS Device Integration and Packaging

2022

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“…In this work, we propose the use of a single chip composed by the energy harvester, the power management circuit, and the storage capacitors. With this monolithic integrated circuit based on a CMOS-compatible technology [33], the cost of the energy harvesting system can be reduced. In addition, taking advantage of the silicon area on top of the cantilever and the rest of the chip to add the integrated circuits and capacitors (Figure 10a), the area of the entire system can be reduced.…”

Section: Proposed Monolithic System and Fabrication Processmentioning

confidence: 99%

“…In addition, device encapsulation and packaging usually represents a large part of the manufacturing costs of MEMS devices and integrated circuits [30,31,32]. For these reasons, our goal is to monolithically combine MEMS and CMOS technologies to obtain a fully integrated system comprising of a piezoelectric generator and its associated converter circuit [33,34,35,36,37].…”

Section: Introductionmentioning

confidence: 99%

Optimization of a Piezoelectric Energy Harvester and Design of a Charge Pump Converter for CMOS-MEMS Monolithic Integration

Duque

Leon-Salguero

Sacristán

et al. 2019

Sensors

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The increasing interest in the Internet of Things (IoT) has led to the rapid development of low-power sensors and wireless networks. However, there are still several barriers that make a global deployment of the IoT difficult. One of these issues is the energy dependence, normally limited by the capacitance of the batteries. A promising solution to provide energy autonomy to the IoT nodes is to harvest residual energy from ambient sources, such as motion, vibrations, light, or heat. Mechanical energy can be converted into electrical energy by using piezoelectric transducers. The piezoelectric generators provide an alternating electrical signal that must be rectified and, therefore, needs a power management circuit to adapt the output to the operating voltage of the IoT devices. The bonding and packaging of the different components constitute a large part of the cost of the manufacturing process of microelectromechanical systems (MEMS) and integrated circuits. This could be reduced by using a monolithic integration of the generator together with the circuitry in a single chip. In this work, we report the optimization, fabrication, and characterization of a vibration-driven piezoelectric MEMS energy harvester, and the design and simulation of a charge-pump converter based on a standard complementary metal–oxide–semiconductor (CMOS) technology. Finally, we propose combining MEMS and CMOS technologies to obtain a fully integrated system that includes the piezoelectric generator device and the charge-pump converter circuit without the need of external components. This solution opens new doors to the development of low-cost autonomous smart dust devices.

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Design of an FM Transmitter Powered By Piezoelectric Energy

Musa

Paul

2019

2019 IEEE International Smart Cities Conference (ISC2)

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Towards the Monolithic Integration of Converter Circuitry and Piezoelectric MEMS Energy Harvesters

Cited by 3 publications

References 4 publications

Application of DC-DC Converter in Sensor and MEMS Device Integration and Packaging

Application of DC-DC Converter in Sensor and MEMS Device Integration and Packaging

Optimization of a Piezoelectric Energy Harvester and Design of a Charge Pump Converter for CMOS-MEMS Monolithic Integration

Design of an FM Transmitter Powered By Piezoelectric Energy

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