We present analytical expressions for MOSFET distortion as a function of inversion level, represented by g m /I D as a proxy. The expressions are particularly useful for moderate inversion, where the generic textbook equations fail. Unlike previous approaches, the method requires only a small number of technology parameters. For an estimation of g m nonlinearity, only the subthreshold slope is needed. Two additional parameters are required to model g ds nonlinearity. The derived expressions are validated based on SPICE simulations using a well-calibrated 65-nm PSP model set.