2011
DOI: 10.1021/nn201207c
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Transfer of CVD-Grown Monolayer Graphene onto Arbitrary Substrates

Abstract: Reproducible dry and wet transfer techniques were developed to improve the transfer of large-area monolayer graphene grown on copper foils by chemical vapor deposition (CVD). The techniques reported here allow transfer onto three different classes of substrates: substrates covered with shallow depressions, perforated substrates, and flat substrates. A novel dry transfer technique was used to make graphene-sealed microchambers without trapping liquid inside. The dry transfer technique utilizes a polydimethylsil… Show more

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Cited by 1,329 publications
(1,140 citation statements)
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References 60 publications
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“…On the other hand, CVD growth of graphene on catalytic metals, such as Cu [21] and Ni [17,21,311], is a promising approach for efficient large-scale production of defect-free graphene with controllable number of layers. Moreover, the resulting monolayer graphene can be easily transferred to arbitrary substrates [312]. Therefore, this section would concentrate on the generation of defects during graphene synthesis in the CVD process.
10.1080/14686996.2018.1494493-F0016Figure 16.Fabrication of monolayer graphene by (a) mechanical exfoliation [320], (b) reduction of GO [353], (c) epitaxial growth [354] and (d) CVD growth [321,312].
…”
Section: Disorders In Graphene Structurementioning
confidence: 99%
See 1 more Smart Citation
“…On the other hand, CVD growth of graphene on catalytic metals, such as Cu [21] and Ni [17,21,311], is a promising approach for efficient large-scale production of defect-free graphene with controllable number of layers. Moreover, the resulting monolayer graphene can be easily transferred to arbitrary substrates [312]. Therefore, this section would concentrate on the generation of defects during graphene synthesis in the CVD process.
10.1080/14686996.2018.1494493-F0016Figure 16.Fabrication of monolayer graphene by (a) mechanical exfoliation [320], (b) reduction of GO [353], (c) epitaxial growth [354] and (d) CVD growth [321,312].
…”
Section: Disorders In Graphene Structurementioning
confidence: 99%
“…polymethylmethacrylate (PMMA)) to support the graphene while etching the metal catalyst away in an etchant [312]. Polymer-on-graphene layer is then transferred to a specified substrate, followed by dissolution of the polymer layer.…”
Section: Disorders In Graphene Structurementioning
confidence: 99%
“…The moiré superstructure shows that the lattice constant of the h-BN layer is approximately 2.56 Å, approximately 2% larger than the in-plane lattice constant of bulk h-BN, 2.51 Å. 24,25 Thus, the moiré superstructure suggests that the h-BN layer is under tensile stress on the SiC substrate. When the single-crystal h-BN layer was heated above 1150 ℃, the spot positions in the LEED pattern gradually moved from that of 2% stretched h-BN to graphene, and subsequently to a pattern corresponding to unstrained h-BN; the (5 × 5) LEED 6 pattern gradually disappeared and, subsequently, a moiré LEED pattern with R0° around the LEED spots of graphene emerged (see Figure 1d-f and Figure S1 in Supporting Information).…”
Section: Introductionmentioning
confidence: 97%
“…Chemical vapor deposition (CVD) grown graphene from the copper foil was transferred onto this device using standard transfer techniques. 37 The transferred graphene layer was typically p-doped. Graphene was then patterned by electron beam lithography and oxygen plasma to avoid contact with the aluminum pad on the n + doping region.…”
Section: Methodsmentioning
confidence: 99%