2016
DOI: 10.1109/jeds.2015.2497086
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Transparent and Flexible Thin Film Electroluminescent Devices Using HiTUS Deposition and Laser Processing Fabrication

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Cited by 4 publications
(3 citation statements)
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“…Inorganic materials such as metals, functional metals, semiconductors, oxides and ceramics can be deposited via DC/RF plasma sputtering onto flexible substrates, but it is unclear how the flexible substrate affects their quality and properties relative to the same thin films coated onto traditional solid substrates like glass or Silicon wafers. This is a growing field of research and development and very interesting studies have already been published reporting the deposition of flexible structures for energy harvesting [5], flexile ferroelectric random access memories [6], flexible electroluminescent devices [7], flexible organic ferroelectrics [8], flexible synthetic anti-ferromagnets and nano-wires [9] and flexible solar cells [10]. In this paper we describe the deposition and experimental studies of flexible polycrystalline Ni80Fe20 permalloy thin films, together with a comparison study of their magnetic properties in rigid and flexible forms.…”
Section: Introductionmentioning
confidence: 99%
“…Inorganic materials such as metals, functional metals, semiconductors, oxides and ceramics can be deposited via DC/RF plasma sputtering onto flexible substrates, but it is unclear how the flexible substrate affects their quality and properties relative to the same thin films coated onto traditional solid substrates like glass or Silicon wafers. This is a growing field of research and development and very interesting studies have already been published reporting the deposition of flexible structures for energy harvesting [5], flexile ferroelectric random access memories [6], flexible electroluminescent devices [7], flexible organic ferroelectrics [8], flexible synthetic anti-ferromagnets and nano-wires [9] and flexible solar cells [10]. In this paper we describe the deposition and experimental studies of flexible polycrystalline Ni80Fe20 permalloy thin films, together with a comparison study of their magnetic properties in rigid and flexible forms.…”
Section: Introductionmentioning
confidence: 99%
“…The relatively high diffuse reflectance of the dielectric and EL film severely limits the specular transparency of the bifacial devices, which appear to be rather hazy translucent (Figure S3). Please note that there are numerous reports of semitransparent ACEL devices, where the dielectric and light-emitting layers have been prepared by sputtering 29 or atomic layer deposition 30 that afford smooth layers with a high specular transmittance.…”
Section: ■ Results and Discussionmentioning
confidence: 99%
“…Laser processing was undertaken in air using a KrF Lambda Physik 305i excimer laser (248 nm) and a beam delivery system providing a homogenised 13 mm × 13 mm square beam at the sample plane (hence covering the full area of the 1 cm × 1 cm Hall samples). This configuration was also used previously for laser processing of thin phosphor films for foldable displays [11] and has been demonstrated to facilitate large area processing of display substrates via a sample step and repeat process. A range of processing parameters was used by varying the fluence (48-295 mJ cm −2 ) and the number of pulses (1-6000) at a pulse frequency of 10 Hz.…”
Section: Methodsmentioning
confidence: 99%