The stability of the figures of merit of transparent inverter circuits at temperatures up to 150 • C and under illumination by light in the visible spectral range is investigated. The inverter circuits consist of two transparent metal-semiconductor field-effect transistors. For temperatures up to 150 • C, the inverters remain operational; the gate electrode degradation affects the voltage transfer characteristic (VTC) for temperatures above 90 • C. Except for blue light, which slightly alters the VTC, visible light does not influence the device operation.Index Terms-Inverters, light stability, metal-semiconductor field-effect transistor (MESFET) integrated circuits, thermal stability, transparent electronics.