Transport of evaporated material through support gas in conjunction with ion plating: I

Sputter-engineering a first-order magnetic phase transition in sub-15-nm-thick single-crystal FeRh films

“…These experimental results can be qualitatively understood, neglecting the effect associated to the misfit strain (< 0.5%) between FeRh and MgO, in terms of the surface free energy [53], γ, associated to the system formed by the (001) MgO substrate surface [54], γ MgO subs = 1.1 Jm −2 , (001)Fe [55] and (001)Rh effect known as atom-peening [20]. This unique aspect of sputtering deposition technology has been experimentally [61] and theoretically [62,63] tested.…”

The Low-Pressure Gas and Vacuum Processing Environment

“…[12]- [15] Figure 3-4 shows the mean free path for thermalization of energetic molecules in argon as a function of mass and energy. The distance that the energetic molecule travels and the number of collisions that it must make to become thermalized depends on its energy, the relative masses of the molecules, gas pressure, and the gas temperature.…”