Transverse magnetic field effects on spatial electron temperature distribution in a 13.56 MHz parallel plate capacitive discharge

Abstract

The effect of a transverse magnetic field on spatial electron temperature Te distribution along the line joining the center of capacitively driven rectangular discharge plates, operated at 13.56 MHz in a push-pull configuration, has been presented. It is found that the electron temperature distribution is almost uniform at low operating pressure (1 Pa). However, as the background pressure increases, the electron temperature tends to peak near the discharge plates. The overall magnitude in Te is also found to increase throughout the volume on account of increasing the background pressure. This experimental observation has been qualitatively depicted by COMSOL Multiphysics® fluid simulation. A plausible explanation has been given to explain the rise in Te due to the combined effect of the magnetic field and background pressure in this setup.

Equilibrium properties of inhomogeneous partially-magnetized plasma containing negative ions

“…As the electrons collide with the background gas atoms, the temperature in the central region becomes isotropic. As reported in our previous studies, Binwal et al [60], these effects are further enhanced when an external magnetic field is applied perpendicular to the discharge electrodes. And in our case, electrons would begin to drift parallel to the cylindrical surface in an E × B motion.…”

Influence of magnetic field strength on capacitively coupled CF4 discharge at different pressures

“…There have been numerous studies on the effect of the magnetic field on electropositive discharge, especially for argon gas. It is found that spatial electron temperature distribution is affected by a transverse magnetic field at high pressure [26]. The electron kinetics were strongly affected by the uniform magnetic field and the nonlocal to the local transition of discharge characteristics was induced at stronger magnetic fields for high discharge frequencies [27].…”

Dynamics of dust particles in the glow discharge stratum in crossed E × B field

“…[11][12][13][14][15] Although the dynamic behaviour of dust particles in a transverse magnetic field to the discharge axis was observed and analysed, these experiments were usually carried out in plasma with a high-frequency discharge. [16][17][18][19][20] However, the properties of micron particles in a stratified glow discharge in a crossed field are still unclear, since there is an absence of experimental work. It should be noted that many plasma devices are operated in ExB field configurations.…”