Travel range extension of a MEMS electrostatic microactuator

Piyabongkarn, D.; Sun, Yu; Rajamani, Rajesh; Sezen, Serdar; Nelson, Bradley J.

doi:10.1109/tcst.2004.838572

Cited by 52 publications

(22 citation statements)

References 13 publications

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“…Hence, much research has been conducted to drive Another challenge for most electrostatic actuators is the pull-in phenomenon or the saddle-node bifurcation that limits their operation range. Thus, much research has been dedicated to extending an operation range of an electrostatic actuator beyond the pull-in point by the use of charge control [7,8], voltage control with a feedback capacitor in series with an electrostatic actuator [9,10], and implementation of a closed-loop control [11][12][13]. For instance, K.O.…”

Section: Overviewmentioning

confidence: 99%

“…Owusu and F.L. Lewis [12] present that their tracking controller through feedback linearization can drive an electrostatic actuator over the entire gap in simulation, and D. Piyabongkarn et al [13] use the inverse nonlinearity technique to displace a comb drive by 80 % of its original gap. However, it is difficult to implement a feedback control due to noise and uncertainty in a displacement measurement.…”

Section: Overviewmentioning

confidence: 99%

“…The frequency response of both the resonant drive circuits at their initial resonant frequencies is presented in Eq. 6.13: 13) where the capacitance of the micromirror C m is derived from the geometric parameters in terms of the normalized angular displacement φ and C 0 as thus:…”

Section: Analytical Model Of Micromirror Coupled With Resonant Drive mentioning

confidence: 99%

See 2 more Smart Citations

Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit

Park

Abdel‐Rahman

2012

Volume 5: 6th International Conference on Micro- And Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference

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Most electrostatic actuators fabricated by MEMS technology require high actuation voltage and suffer from the pull-in phenomenon that limits the operation range. We present an amplitude-modulated resonant drive circuit to drive electrostatic actuators at much lower supply voltage than that of conventional actuators to extend their operation range. Analytical and numerical models facilitate stability analysis of electrostatic actuators coupled with the resonant drive circuit. We study the impact of parasitic capacitance and the quality factor of the resonant drive circuit on the operation range of electrostatic actuators. Furthermore, we present a new method to measure the displacement of electrostatic actuators by sensing the phase delay of the actuation voltage with respect to the input voltage. This measurement method allows us to easily incorporate feedback control into existing electrostatic actuators without any modification to the actuator itself.

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Section: Overviewmentioning

confidence: 99%

Section: Overviewmentioning

confidence: 99%

See 1 more Smart Citation

Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit

Park

Abdel‐Rahman

2012

Volume 5: 6th International Conference on Micro- And Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference

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show abstract

“…In magnetic levitation application, the magnetic force varies as the square of the current and varies inversely with the square of the gap between the electromagnetic and the reaction surface (Piyabongkarn et al 2005). A piezoelectric actuator is used to excite a deformable array (Ries and Smith 1998), and the half mode is clear observed from its frequency response.…”

Section: Introductionmentioning

confidence: 99%

Modeling and verification of the double frequency effect using a MEMS device

Chiou

Lin

2006

Microsyst Technol

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The derivation, verification, and implication of the nonlinear dynamic and frequency response of electrostatic actuator due to the double frequency effect (DFE) were reported in this study. In particular, an extra mode called half mode was observed and measured in various studies. However, a complete in-depth discussion of the effect was not reported in the past. In the present study, a second-order dynamical equation was adapted firstly to model the dynamic and frequency response of electrostatic actuator where typical harmonic input signal with a dc bias was used. Secondly, by solving the equation, complex waveform in dynamic response and an extra half mode in frequency response due to the double frequency effect can be observed and discussed. To verify the simulated result, an electrostatic driving device was fabricated using PolyMUMPS Ó process. Note that in frequency response, when dc bias is equal to the amplitude of ac signal, simulated and experimental results indicated that the amplitude of half mode was one-fourth of first mode.

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“…The "self-testing" technique is also limited by the intrinsic pull-in limit [22] which makes full-range calibration infeasible. Furthermore, the shape from motion calibration method minimizes the possibility of damaging the tiny, fragile micro force sensors during calibration.…”

Section: Introductionmentioning

confidence: 99%

Calibration of multi-axis MEMS force sensors using the shape from motion method

Sun¹,

Kim²,

Voyles³

et al.

Proceedings 2006 IEEE International Conference on Robotics and Automation, 2006. ICRA 2006.

Self Cite

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-This paper presents a new design of a two-axis MEMS (microelectromechanical systems) capacitive force sensor with strict linearity and a new sensor calibration method for micro-sensors. Precise calibration of multi-axis micro force sensors is difficult for several reasons, including the need to apply many known force vectors at precise orientations at the micro force scale, and the risk of damaging the small, fragile MEMS device. In this paper the shape from motion method is introduced for micro force sensors resulting in a rapid and effective calibration technique. Structural-electrostatic coupled field simulations are conducted in order to optimize the sensor design, which is calibrated with the shape from motion method as well as the least squares method for comparison purposes. Calibration results demonstrate that the shape from motion method is an effective, practical, and accurate method for calibrating multiaxis micro force sensors.

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Travel range extension of a MEMS electrostatic microactuator

Cited by 52 publications

References 13 publications

Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit

Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit

Modeling and verification of the double frequency effect using a MEMS device

Calibration of multi-axis MEMS force sensors using the shape from motion method

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