High precision infrared lens is of great demand nowadays, especially in the area of remote sensing. The traditional optical machining method couldn't satisfy the processing requirements neither in efficiency nor in quality. Therefore, a novel processing method was used in this paper in order to realize the concave aspherical surface in germanium (Ge) infrared lens with high accuracy. Single point diamond turning technique was first applied for the rapid promotion of surface figure accuracy of the rough machined lens. According to the measurement data obtained by non-contact profile scanning, the shape error in low and middle frequency was figured with compensation processing technology. The value of root mean square (RMS) was constrained within 1/20λ at this stage. As for the residual shape error of high frequency, ion beam deterministic figuring, instead of manual operation, was employed for its high predictability and accuracy. The final RMS of this concave aspherical surface in diameter of 69 mm was improved to 1/30λ based on the above method. Meanwhile, the deviation of vertex radius of curvature was precisely controlled within 0.5 μm, which was far beyond the design requirements by an order of magnitude. The results in this paper have demonstrated that single point diamond turning of infrared lens assisted with ion beam figuring was of unique superiority both in accuracy and efficiency, which has great potential in manufacturing of astronautic optical components.