Triple Crystal Diffractometer Investigations of Imperfections in Silicon Crystals with Laue-Case Diffraction

Abstract

Possibilities of triple crystal diffractometer measurements with Laue‐case diffraction of parallel (+n, −n, +n) setting are investigated. Based on a theoretical description the intensity distribution of TCD curves is discussed. Calculated and experimental results of perfect crystals are presented. The diffuse scattering of microdefects in silicon crystals is measured near the reciprocal lattice point with CuKα and MoKα radiation in the Laue case and for comparison in the Bragg case. Despite of some disadvantages, triple crystal diffractometry in Laue case is a very sensitive method to investigate the deformation field of microdefects, especially in the volume of the sample.

Characterization of process-induced defects in silicon with triple-crystal diffractometry

“…Increasing defect size leads to a restriction of the Huang scattering to the immediate vicinity of the Bragg peak. In this case it is necessary to use a double-crystal diffractometer or better a triple-crystal diffractometer in parallel position to increase the resolution and to measure the distribution of diffuse scattering in an integral (Thomas, Baldwin & Dederichs, 1971;Patel, 1975) or in differential geometry (Larson & Schmatz, 1974;Iida & Kohra, 1979;Iida, 1979;Zaumseil & Winter, 1982b), respectively.…”

X-ray diffracton studies of annealed Czochralski-grown silicon. II. Triple-crystal diffractometry

“…(2) where C; (i = 1, 2, 3) describes the reflection curves of the three crystals following the dynamical theory of X-ray diffraction, K is a proportionality factor that includes the source intensity, geometrical parameters etc. Both polarization states have to be considered (Zaumseil & Winter, 1982). Fig.…”

Dyson and Bethe‐Salpeter equations for dynamical X‐ray diffraction in crystals with randomly placed defects

“…Then the curves in Fig. 3 a and b represent the "diffuse" peaks in triple crystal rocking curves [18]. Variable A6, which corresponds t o the angular position of the third crystal, is connected with the angular deviation CL of the wave falling on the crystal with defects (i.e.…”

“…Thus, the angular intensity distribution of the diffracted wave is modified near A 6 = a by the coherent transmittivity and has a minimum, and in the case of the transmitted wave there is a maximum a t A 6 = oc owing to the maximum of the coherent reflectivity. Unfortunately, these dynamical effects are hardly to observe experimentally, since their positions are the same as the positions of the pseudopeaks in triple crystal rocking curves [18]. The angular intensity distributions have maxima a t A 6 = a ( lcos 26) z 0, which correspond t o the maxima of the diffuse peaks following from the kinematical theory [18].…”