Tungsten Deposited Scanning Probe Microscope Tips for Critical Dimension Measurement

Yasutake, Masatoshi; Kaito, Takashi; Wakiyama, S.

doi:10.1063/1.1639704

Cited by 2 publications

(1 citation statement)

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“…Electron-or ion-beam-induced metal deposition can individually grow metal nanowires with diameters below 100 nm at desired positions. Yasutake et al deposited single tungsten pillars with diameters of 90 nm on flattened AFM probe ends by focusedion-beam-(FIB)-induced deposition (26). However, the beam-induced deposition introduces deposition of other elements such as C from the organometallic precursors and Ga from the ion beam.…”

Section: Introductionmentioning

confidence: 99%

Electrodeposited Metallic Nanowires as a Scanning Probe Tip

Motoyama

Prinz

2011

ECS Trans.

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Section: Introductionmentioning

confidence: 99%

Electrodeposited Metallic Nanowires as a Scanning Probe Tip

Motoyama

Prinz

2011

ECS Trans.

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Electrochemical Deposition of Metallic Nanowires as a Scanning Probe Tip

Motoyama¹,

Dasgupta²,

Prinz³

2009

J. Electrochem. Soc.

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This paper describes Ni electrodeposition as a method of producing metallic nanowires on a scanning probe tip. A polycarbonate porous membrane was used as a template for the growth of nanowires on a Si atomic force microscope ͑AFM͒ probe tip. A thin Pt cathode was deposited on the tip apex and onto the underlying porous membrane with the help of a focused ion beam. The number of nanowires deposited on the AFM probe tip was controlled by the cathode area and the duration of Ni deposition. Surface imaging was performed with the nanowire AFM probes. Elastic and inelastic deformations of the nanowires were observed, and the related beam mechanics were calculated. D431) unless CC License in place (see abstract). ecsdl.org/site/terms_use address. Redistribution subject to ECS terms of use (see 132.174.255.116 Downloaded on 2015-03-11 to IP D432 Journal of The Electrochemical Society, 156 ͑10͒ D431-D438 ͑2009͒ D432 ) unless CC License in place (see abstract). ecsdl.org/site/terms_use address. Redistribution subject to ECS terms of use (see 132.174.255.116 Downloaded on 2015-03-11 to IP Appendix AThe moment of inertia, I x , and section modulus, S x , of an inverted-conical-shaped beam having a larger diameter d A at the free end and a smaller diameter d B at the fixed end are given by 47 Figure 14. SEM image of inelastically deformed nanowires on the AFM probe tip previously shown in Fig. 9. The resulting displacements are indicated by the vectors. Scale bar: 1 m.D437 Journal of The Electrochemical Society, 156 ͑10͒ D431-D438 ͑2009͒ D437 ) unless CC License in place (see abstract). ecsdl.org/site/terms_use address. Redistribution subject to ECS terms of use (see 132.174.255.116 Downloaded on 2015-03-11 to IP D438 Journal of The Electrochemical Society, 156 ͑10͒ D431-D438 ͑2009͒ D438 ) unless CC License in place (see abstract). ecsdl.org/site/terms_use address. Redistribution subject to ECS terms of use (see 132.174.255.116 Downloaded on 2015-03-11 to IP

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Tungsten Deposited Scanning Probe Microscope Tips for Critical Dimension Measurement

Cited by 2 publications

References 5 publications

Electrodeposited Metallic Nanowires as a Scanning Probe Tip

Electrodeposited Metallic Nanowires as a Scanning Probe Tip

Electrochemical Deposition of Metallic Nanowires as a Scanning Probe Tip

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