Tungsten–titanium diffusion barriers for silver metallization

Bhagat, Shekhar; Han, Hauk; Alford, Terry

doi:10.1016/j.tsf.2006.03.049

Cited by 51 publications

(22 citation statements)

References 16 publications

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“…Also, and the tungsten content on the surface of the alloyed layer is maximum (∼75 wt.%) as vividly shown in the EDS analysis. According to the Ti-W equilibrium phase diagram [26], tungsten is important as an alloying agent with titanium because and ␤-titanium in tungsten exhibits a high solid solubility as shown in Fig. 2(b).…”

Section: Surface Microstructure and Composition Of The Tungstenized Lmentioning

confidence: 99%

Nano-mechanical characterization of plasma surface tungstenized layer by depth-sensing nano-indentation measurement

Wu¹,

Yin²,

Tang³

et al. 2015

Applied Surface Science

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Section: Surface Microstructure and Composition Of The Tungstenized Lmentioning

confidence: 99%

Nano-mechanical characterization of plasma surface tungstenized layer by depth-sensing nano-indentation measurement

Wu¹,

Yin²,

Tang³

et al. 2015

Applied Surface Science

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“…For those devices where silver concentration within the silicon is a concern, a thin diffusion barrier could be deposited between the silver and silicon. 24 Provided the processing temperature of such a device is kept below 500-600°C, these layers could be used to prevent adverse silver diffusion.…”

Section: -mentioning

confidence: 99%

Silver diffusion bonding and layer transfer of lithium niobate to silicon

Diest

Archer

Dionne

et al. 2008

Applied Physics Letters

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A diffusion bonding method has been developed that enables layer transfer of single crystal lithium niobate thin films to silicon substrates. A silver film was deposited onto both the silicon and lithium niobate surfaces prior to bonding, and upon heating, a diffusion bond was formed. Transmission electron microscopy confirms the interface evolution via diffusion bonding which combines interfacial diffusion, power law creep, and growth of ͑111͒ silver grains to replace the as-bonded interface by a single polycrystalline silver film. The transferred film composition was the same as bulk lithium niobate.

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“…A Van der Pauw device pattern was formed on the 2 μm epitaxial layer by reactive ion etching. Metallization of TiWN was used as metal diffusion barrier, which showed very good Au barrier property and thermal stability up to 700 C. [7] The measurements were carried out in a vacuum chamber with the pressure pumped below 1 mTorr. The measurement results in figure 1 show that the Seebeck coefficient increases with temperature.…”

Section: Materials Characterizationmentioning

confidence: 99%

6 Watt Segmented Power Generator Modules using Bi₂Te₃ and (InGaAs)_1-x(InAlAs)_x Elements Embedded with ErAs Nanoparticles

et al. 2008

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We report the fabrication and characterization of segmented element power generator modules of 16 x 16 thermoelectric elements consisting of 0.8 mm thick Bi 2 Te 3 and 50 μm thick ErAs:(InGaAs) 1-x (InAlAs) x with 0.6% ErAs by volume. Erbium Arsenide metallic nanoparticles are incorporated to create scattering centers for middle and long wavelength phonons, and to form local potential barriers for electron filtering. The thermoelectric properties of ErAs:(InGaAs) 1-x (InAlAs) x were characterized in terms of electrical conductivity and Seebeck coefficient from 300 K up to 830 K. Generator modules of Bi 2 Te 3 and ErAs:(InGaAs) 1-x (InAlAs) x segmented elements were fabricated and an output power of 6.3 W was measured. 3D finite modeling shows that the performance of thermoelectric generator modules can further be enhanced by the improvement of the thermoelectric properties of the element materials, and reducing the electrical and thermal parasitic losses.

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Tungsten–titanium diffusion barriers for silver metallization

Cited by 51 publications

References 16 publications

Nano-mechanical characterization of plasma surface tungstenized layer by depth-sensing nano-indentation measurement

Nano-mechanical characterization of plasma surface tungstenized layer by depth-sensing nano-indentation measurement

Silver diffusion bonding and layer transfer of lithium niobate to silicon

6 Watt Segmented Power Generator Modules using Bi₂Te₃ and (InGaAs)_1-x(InAlAs)_x Elements Embedded with ErAs Nanoparticles

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Tungsten–titanium diffusion barriers for silver metallization

Cited by 51 publications

References 16 publications

Nano-mechanical characterization of plasma surface tungstenized layer by depth-sensing nano-indentation measurement

Nano-mechanical characterization of plasma surface tungstenized layer by depth-sensing nano-indentation measurement

Silver diffusion bonding and layer transfer of lithium niobate to silicon

6 Watt Segmented Power Generator Modules using Bi2Te3 and (InGaAs)1-x(InAlAs)x Elements Embedded with ErAs Nanoparticles

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Product

Resources

About

6 Watt Segmented Power Generator Modules using Bi₂Te₃ and (InGaAs)_1-x(InAlAs)_x Elements Embedded with ErAs Nanoparticles