Tuning Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducers Using DC Bias Voltage

Wu, Zhipeng; Liu, Wenjuan; Tong, Zhihao; Cai, Yao; Sun, Chengliang; Lou, Liang

doi:10.1109/ted.2021.3137766

Cited by 17 publications

(6 citation statements)

References 35 publications

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“…Note that the −3 dB bandwidth (BW) (20.3 kHz) in water is larger than that (11.1 kHz) in air. The quality factor ( Q ) is defined as Q = f r /BW , where f r denotes the resonance frequency 34 . The calculated Q of the PMUTs in water is ~51.3, which is generally higher than that of bulk piezoelectric transducers (typically Q = 5).…”

Section: Methodsmentioning

confidence: 99%

A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications

Gao

Chen

et al. 2023

Microsyst Nanoeng

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Transit-time ultrasonic flowmeters (TTUFs) are among the most widely used devices for flow measurements. However, traditional TTUFs are usually based on a bulk piezoelectric transducer, which limits their application in small-diameter channels. In this paper, we developed a miniaturized TTUF based on scandium-doped aluminum nitride (ScAlN) piezoelectric micromachined ultrasonic transducers (PMUTs). The proposed TTUF contains two PMUT-based transceivers and a π-type channel. The PMUTs contain 13 × 13 square cells with dimensions of 2.8 × 2.8 mm2. To compensate for the acoustic impedance mismatch with liquid, a layer of polyurethane is added to the surface of the PMUTs as a matching layer. The PMUT-based transceivers show good transmitting sensitivity (with 0.94 MPa/V surface pressure) and receiving sensitivity (1.79 mV/kPa) at a frequency of 1 MHz in water. Moreover, the dimensions of the π-type channel are optimized to achieve a measurement sensitivity of 82 ns/(m/s) and a signal-to-noise ratio (SNR) better than 15 dB. Finally, we integrate the fabricated PMUTs into the TDC-GP30 platform. The experimental results show that the developed TTUF provides a wide range of flow measurements from 2 to 300 L/h in a channel of 4 mm diameter, which is smaller than most reported channels. The accuracy and repeatability of the TTUF are within 0.2% and 1%, respectively. The proposed TTUF shows great application potential in industrial applications such as medical and chemical applications.

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Section: Methodsmentioning

confidence: 99%

A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications

Gao

Chen

et al. 2023

Microsyst Nanoeng

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“…The PMUTs are fabricated on Silicon-On-Insulator (SOI) wafer [ 25 ]. As shown in Figure 1 , the PMUTs diaphragm is comprised of five parts: a Si elastic layer, a piezoelectric Aluminum Nitride (AlN) layer, Molybdenum (Mo) layers for the top and bottom electrodes and oxide.…”

Section: System Designmentioning

confidence: 99%

“…In our previous work, an ultrasonic proximity-sensing skin based on PMUTs is proposed [ 25 ]. This skin can detect targets within 300 mm and 60 degrees in front, which contains two PMUTs-based receivers and a PMUTs-based transmitter.…”

Section: Introductionmentioning

confidence: 99%

An Ultrasonic Target Detection System Based on Piezoelectric Micromachined Ultrasonic Transducers

Gao

Tong

et al. 2023

Micromachines

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In this paper, an ultrasonic target detection system based on Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) is proposed, which consists of the PMUTs based ultrasonic sensor and the sensor system. Two pieces of 3 × 3 PMUTs arrays with the resonant frequency of 115 kHz are used as transmitter and receiver of the PMUTs-based ultrasonic sensor. Then, the sensor system can calculate the target’s position through the signal received by the above receiver. The static and dynamic performance of the proposed prototype system are characterized on black, white, and transparent targets. The experiment results demonstrated that the proposed system can detect targets of different colors, transparencies, and motion states. In the static experiments, the static location errors of the proposed system in the range of 200 mm to 320 mm are 0.51 mm, 0.50 mm and 0.53 mm, whereas the errors of a commercial laser sensor are 2.89 mm, 0.62 mm, and N\A. In the dynamic experiments, the experimental materials are the targets with thicknesses of 1 mm, 1.5 mm, 2 mm and 2.5 mm, respectively. The proposed system can detect the above targets with a maximum detection error of 4.00%. Meanwhile, the minimum resolution of the proposed system is about 0.5 mm. Finally, in the comprehensive experiments, the proposed system successfully guides a robotic manipulator to realize the detecting, grasping, and moving of a transparent target with 1 mm. This ultrasonic target detection system has demonstrated a cost-effective method to detect targets, especially transparent targets, which can be widely used in the detection and transfer of glass substrates in automated production lines.

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“…The PMUT is fabricated on the silicon-on-insulator (SOI) platform of the Shanghai Industrial µ Technology Research Institute (SITRI). Its fabrication process is shown in Figure 2 a–f [ 38 , 39 ]. Figure 2 a shows the customized single-sided polished SOI wafer.…”

Section: The Design Of the Mems Hydrophonementioning

confidence: 99%

A High Sensitivity AlN-Based MEMS Hydrophone for Pipeline Leak Monitoring

Zhi

Chen

et al. 2023

Micromachines

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In this work, a miniaturized, low-cost, low-power and high-sensitivity AlN-based micro-electro-mechanical system (MEMS) hydrophone is proposed for monitoring water pipeline leaks. The proposed MEMS Hydrophone consists of a piezoelectric micromachined ultrasonic transducer (PMUT) array, an acoustic matching layer and a pre-amplifier amplifier circuit. The array has 4 (2 × 2) PMUT elements with a first-order resonant frequency of 41.58 kHz. Due to impedance matching of the acoustic matching layer and the 40 dB gain of the pre-amplifier amplifier circuit, the packaged MEMS Hydrophone has a high sound pressure sensitivity of −170 ± 2 dB (re: 1 V/μPa). The performance with respect to detecting pipeline leaks and locating leak points is demonstrated on a 31 m stainless leaking pipeline platform. The standard deviation (STD) of the hydroacoustic signal and Monitoring Index Efficiency (MIE) are extracted as features of the pipeline leak. A random forest model is trained for accurately classifying the leak and no-leak cases using the above features, and the accuracy of the model is about 97.69%. The cross-correlation method is used to locate the leak point, and the localization relative error is about 10.84% for a small leak of 12 L/min.

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Tuning Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducers Using DC Bias Voltage

Cited by 17 publications

References 35 publications

A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications

A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications

An Ultrasonic Target Detection System Based on Piezoelectric Micromachined Ultrasonic Transducers

A High Sensitivity AlN-Based MEMS Hydrophone for Pipeline Leak Monitoring

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